ZX2-LDA41 2M

**Smart Sensors Laser Sensors CMOS Type ZX2** 

CSM_ZX2_DS_E_6_3 

## **Stable measurement that is unaffected by workpiece changes. The simple setting for everyone.** 

- High-precision measurement to approx. 10 μ m. 

- Stable measurement regardless of movement or changes in workpiece color or material. 

- Smart tuning for optimal setting with one button for essentially any user. 

- The 11-segment display enables reading characters at a glance. 

- Four built-in banks make changeovers easy. 

- Stable measurement in harsh environments with IP67 protection for Sensor Head and robot cable. 

- Laser life indicator to prevent line stoppage through visualization. 

Be sure to read _Safety Precautions_ on page 11 

For the most recent information on models that have been certified for safety standards, refer to your OMRON website. 

## **Features** 

**Stability Easy** ~~Se 3s~~ Measurements to a Precision in the Order of 10 µm for any Workpiece Essentially Anyone Can Set Optimum Conditions Stable measurement even for changes in colors and materials or for moving *[2] workpieces with CMOS that has a dynamic range of two million times Patented Easily select smart tuning The use of a unique OMRON HSDR-CMOS (high-speed and dynamic range) image sensor with one button. L Patented[*][2] and a step-less laser power adjustment algorithm enable stable measurements for any color or surface conditions, from metals to substrates, rubber, and transparent objects. The optimum settings for stable measurement can be achieved with one Linearity of ±0.05~0.3%F.S. achieves a measurement precision in the order of ±10~30µm. *[1] smart tuning button. The settings will not rely on the skill of the user. 

## Stabl **e measurements on objects with cha** nging **color/material** 

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Measurements for Bright Workpieces Measurements for Dark Workpieces<br>Small CMO S shut ter time Large<br>Xl — _ es 1<br>\ Weak Laser e missi on power Strong<br>Sensor configuration by just a pushing<br>Le T wo-ele ment > eee the SMART button<br>oy autom atic ad justment<br>Shinny metals Black rubb er<br>The light int ake a mount remains _ [ Three selectable tunings<br>the same even  if the w orkpiece changes .<br>Light<br>intake amount Scene.1 Scene.2<br>One type of workpiece<br>Shinny metals Black rubber<br>n b Ld<br>Linearity characteristic of Linearity characteristic of<br>existing product according to material1 1 the ZX2 according to material No Variation<br>0.80.6 0.80.6 for Different<br>0.4 0.4 Workpieces<br>0.2 0.2<br>0 0<br>-0.2 -0.2<br>-0.4-0.6-0.6-1-10 -8White ceramicSUS304, mirror finishingSUS304, hairline (orthogonal)-6 -4 -2 0 SUS304, hairline (parallel)Black rubber2 4 6 8 10 -0.4-0.6-0.6-1-10 -8White ceramicSUS304, mirror finishing SUS304, hairline (orthogonal) -6 -4 -2 0 SUS304Black rubber2 4, hairli6ne (para8llel)10 Single smart tuning<br>Distance (mm) Distance (mm) Best configuration for stable detection<br>in case of objects do not change by<br>Stable measurements on moving objects pushing the button for one second<br>[<br>A line beam is used in addition to an emitter beam when dealing with rough surfaces to average out the<br>Scene.3<br>amount of reflected light and to offset the amount of light received at a high-speed measurement period of<br>30 µs in order to reduce variations in received light and to enable stable measurements for moving objects. Surface conditions<br>Limit of resolution of Limit of resolution of of the workpiece are variable<br>existing product when workpiece is moving400300200100 Workpiece:SUS304, hairline (parallel) Max error: approx.400µm 40302010the ZX2 when workWorkpiece:SUS304, hairline (parallel)piece is movingMax error: approx.7µm No Variation Workpiecesfor Moving<br>0 0<br>-100 -10<br>-200 -20<br>-300 -30<br>-400 a -40<br>Rest state Moving condition Rest state Moving condition<br>workpiece workpiece<br>*1. The resolution, angle characteristic, measuring range, linearity, spot diameter, and other specificationsdiffer among models. Refer to The linearity indicates the error with respect to the ideal straight line of the displacement output in the  Ratings and Specifications  for details. Active smart tuningContinuous configuration improvement<br>case of measuring Omron’ s standard target object. Linearity and measured value may vary depending  for the stable detection of all locations<br>on target object. Before final installation, test the sensor required for the application to validate that the desired measurements have been obtained. by pushing the button for five seconds<br>Linearity (%FS) Linearity (%FS)<br>Measurement error (µm) Measurement error (µm)<br>**----- End of picture text -----**<br>


More accurate settings are made possible by the three tuning methods for different workpiece types and surface conditions. **Scene.1 Scene.2 One type of workpiece Several types of workpiece** Ld Single smart tuning Multi-smart tuning Best configuration for stable detection Ideal configuration for stable detection in case of objects do not change by of changing objects by pushing the pushing the button for one second button for three seconds 

- *2. “Patented” means that we obtained a patent in Japan. (As of October 2019) 

**1** omrRONn ~~a~~ 

**ZX2** 

## **Ordering Information** 

## **Units** 

**Sensor Heads  [Dimensions** ➜ **page 11]** 

|**Sensor Heads  [Dimensions  [Dimensions**|**Sensor Heads  [Dimensions  [Dimensions**➜ **page 11]**|**Sensor Heads  [Dimensions  [Dimensions**➜ **page 11]**|**Sensor Heads  [Dimensions  [Dimensions**➜ **page 11]**||
|---|---|---|---|---|
|**Appearance**<br>Diffuse reflection type|**Sensing method**<br>**Beam shape**<br>**Sensing distance**<br>**Resolution**<br>Diffuse-<br>reflective<br>Line beam<br>1.5μm<br>Spot beam<br>Line beam<br>5μm<br>Spot beam<br>40<br>50±10 mm<br>60<br>65<br>100±35 mm<br>135<br>~~a==~~<br>~~a~~|||**Model**<br>**ZX2-LD50L 0.5M**<br>**ZX2-LD50 0.5M**<br>**ZX2-LD100L 0.5M**<br>**ZX2-LD100 0.5M**|
||Regular-<br>reflective<br>Spot beam<br>1.5μm<br>43<br>48±5mm<br>53<br>~~ee)~~|||**ZX2-LD50V 0.5M**|
|**Amplifier Units  [Dimensions**➜ **page 11]**|||||
|**Accessories (sold separately)**These are not included with the Sensor Head or Amplifier Unit. Please order as necessary.<br>**Appearance**<br>**Power supply**<br>**Output type**<br>**Model**<br>DC<br>NPN<br>**ZX2-LDA11 2M**<br>PNP<br>**ZX2-LDA41 2M**<br>~~i~~|||||
|**Calculating Unit  [Dimensions**➜ **page 12]**<br>**Communications Interface Unit  [Dimensions**➜ **page 12]**|||||
|**Appearance**|**Model**<br>**Appearance**||**Type**<br>**Model**||
||**ZX2-CAL**||RS-232C<br>**ZX2-SF11**||
|**Sensor Head Extension Cables  [Dimensions**➜ **page 12]**|||||
|**Cable Length**|**Model**||||
|1 m|**ZX2-XC1R**||||
|4 m|**ZX2-XC4R**||||
|9 m|**ZX2-XC9R**||||
|20 m|**ZX2-XC20R**||||
|**Note:**Extension cables cannot be coupled and used together.|||||
|**Mounting Brackets  [Dimensions**|**[Dimensions**➜ **page 13]**||||
|**Applicable Sensor Head**|**Appearance**<br>**Model**<br>~~a~~|||**Remarks**|
|ZX2-LD50V<br>ZX2-LD50L<br>ZX2-LD50<br>ZX2-LD100L<br>ZX2-LD100|**E39-L178**<br>**E39-L179**<br>~~to~~<br>~~to~~||Mounting Brackets (1)<br>Nut Plate (1)<br>Phillips screws (M30✕30) (2)||



**2** ~~a~~ 

**ZX2** 

## ~~hss~~ **Sensor Head** 

## **Sensor Heads for Various Applications-select the Range and Type of Beam** 

**New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement** 

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ZX2-LD50L  Line beam type ZX2-LD50V  Spot beam type ZX2-LD100L  Line beam type<br>ZX2-LD50  Spot beam type  (regular-reflective) ZX2-LD100  Spot beam type<br>• [Measurement ran][g][e ] [50][mm] [±][1][0][mm] • [Measurement ran][g][e ] [48][mm] [±5][mm] • [Measurement ran][g][e ] [1][00][mm] [±35][mm]<br>• [Resolution ] 1.5µm • [Resolution ] 1.5µm • [Resolution ] 5µm<br>• [Linearity ] Line beam  ±0.05%F.S. [*1] • [Linearit][y] Spot beam  ±0.3%F.S. • [Linearity ] Line beam  ±0.05%F.S. [*2]<br>Spot beam  ±0.10%F.S. [*1] • [Beam size ] Spot beam  Approx.60µm dia. Spot beam  ±0.10%F.S. [*2]<br>• [Beam size ] Line beam  Approx.60µm×2.6mm • [Beam size ] Line beam  Approx.110µm×2.7mm<br>Spot beam  Approx.60µm dia. Spot beam  Approx.110µm dia.<br>Spot beam Regular-reflective<br>Line beam<br>Precise measurement on  ~ Stable wafer<br>micro-scale objects measurement Stable measurement on<br>rough-surfaced objects<br>*1 Using 40 to 50mm<br>*2 Using 65 to 100mm<br>**----- End of picture text -----**<br>


## **Reliable measurements in harsh environments** 

**IP67, robot cable** i **& temperature characteristic 0.02% F.S./°C** ~— IP67 protection class enables to use the sensor in harsh environments. A robot cable is used as standard between the head and amplifier, that the unit can be used reliably on moving parts. In addition, as 3D UV bond is used to fix the optical components rather than screws, stress can be controlled and a temperature characteristic 0.02% F.S./°C* is realized. 

- If the room temperature varies 1°C, the measured value varies 0.02% F.S. (corresponding to 4µm for the Model ZX2-LD50) 

## **Compact sensor for easy mounting** 

## aE **World smallest*** 

The world’s smallest CMOS laser displacement sensor head is realized in a resin case. Enables to mount the sensor in smallest spaces and to minimize measurement errors arising from temperature fluctuations. 35.5mm Cable can be * According to OMRON investigation of CMOS laser displacement sensors performed in September 2010. fed through from the back —— **47.5mm** 22.6mm 

- According to OMRON investigation of CMOS laser displacement sensors performed in September 2010. 

**3** ~~a~~ 

**ZX2** 

## **Amplifier and Calculating Unit** Ease of Use by “LED Display” and “Calculating Unit” ~~—_=S~~ 

## 11-segment LED display for intuitive configuration 

## Easy calculations of measurements 

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Determination output indicators<br>High (orange)/Pass (green)/ Intuitive operation through<br>Low (orange), two color display cross buttons<br>_<br>11 Segment LED Display<br>**----- End of picture text -----**<br>


## No need for a manual 

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Comparison of the existing 7 segment LED display and<br>An 11 segment LED display is integrated  the 11 segment LED display<br>in the compact housing. Alphanumeric  The 7 segment display on existing models The 11 segment display on model ZX2<br>characters can be read with ease and<br>there is no need to refer to a manual.<br>30mm 30mm<br>31mm 38mm<br>64mm 72mm<br>The compact housing stays just as it is<br>**----- End of picture text -----**<br>


## Perform two calculations with ease 

The calculated results of two sensor heads are displayed on the amplifier unit by just connecting the calculating unit between the two amplifier units. The calculation function can be chosen from the two modes of thickness and subtraction. It is also 

possible to prevent mutual interference by coupling via the calculating units. (Up to five amplifier units can be connected.) 

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Sensor 1<br>Thickness mode Subtraction mode<br>A<br>Sensor 1 0 criterionSensor 2 0 criterion K T S<br>A<br>B<br>Sensor 2<br>B<br>Thickness    T = K + ( A + B ) sa Level difference    S = B - A<br>**----- End of picture text -----**<br>


## Easy change of setup 

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Existing models ZX2<br>The amplifier unit is equipped<br>with four bank functions.<br>Easy change of setup between<br>four modes is supported by<br>Amplifier unit<br>just switching between the  +<br>Built into the unit<br>bank functions. Bank unit<br>cop Ss<br>1<br>BANK BANK 2 3<br>BANK 0<br>**----- End of picture text -----**<br>


**4** 

**ZX2** 

**Specifications** 

## **Diffuse-reflective Sensor Heads** 

|**Item**<br>**Model**|**ZX2-LD50L**|**ZX2-LD50**|**ZX2-LD100L**|**ZX2-LD100**|
|---|---|---|---|---|
|**Optical system**|Diffuse reflective||||
|**Light source**<br>**(wave length)**|Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max.||||
||EN class 2,FDA class 2*5||||
|**Measurement centerpoint**|50 mm||100 mm||
|**Measurement range**|±10 mm||±35 mm||
|**Beam shape**|Line|Spot|Line|Spot|
|**Beam size*1**|Approx. 60μm×2.6 mm|Approx. 60μm dia.|Approx.110μm×2.7 mm|Approx. 110μm dia.|
|**Resolution*2**|1.5μm||5μm||
|**Linearity *3**|±0.05% F.S.(40 to 50 mm)|±0.1% F.S.(40 to 50 mm)|±0.05% F.S.(65 to 100 mm)|±0.1% F.S.(65 to 100 mm)|
|**Temperature characteristic *4**|0.02% F.S. /°C||||
|**Ambient illumination**|Incandescent lamp: 10,000 lx max.(on light receivingside)||||
|**Ambient temperature**|Operating: 0 to 50°C,Storage:−15 to 70°C(with no icingor condensation)||||
|**Ambient humidity**|Operatingand storage: 35% to 85%(with no condensation)||||
|**Dielectric strength**|1,000 VAC,50/60 Hz for 1 min.||||
|**Vibration resistance(destruction)**|10 to 150 Hz,0.7-mm double amplitude,80 min. each in X,Y,and Z directions||||
|**Shock resistance(destruction)**|300 m/s23 times each in six directions(up/down,left/right,forward/backward)||||
|**Degree ofprotection**|IEC60529,IP67||||
|**Connection method**|Connector connection(standard cable length: 500 mm)||||
|**Weight(packed state)**|Approx. 160g (main unit only: Approx. 75g)||||
|**Materials**|Case and cover: PBT(polybutylene terephtahalate),Optical window: Glass,Internal thread: Brass,Cable: PVC||||
|**Accessories**|Instruction sheet,Ferrite core×1(made byTDK Corp. ZCAT1730-0730A),Laser warninglabel(English),FDA||||



## **Regular-reflective Sensor Head** 

|**Item**<br>**Model**|**ZX2-LD50V**|
|---|---|
|**Optical system**|Regular reflective|
|**Light source(wave length)**|Visible-light semiconductor laser with a wavelength of 660 nm and an output of 0.24 mW max. EN class 1, FDA class 1*5|
|**Measurement centerpoint**|48mm|
|**Measurement range**|±5mm|
|**Beam shape**|Spot|
|**Beam size*1**|Approx. 60μm dia.|
|**Resolution*2**|1.5μm|
|**Linearity *3**|±0.3%F.S.(entire range)|
|**Temperature characteristic *4**|0.06%F.S./°C|
|**Ambient illumination**|Incandescent lamp: 10,000lx max.(on light receivingside)|
|**Ambient temperature**|Operating: 0 to 50°C,Storage: -15 to 70°C(with no icingor condensation)|
|**Ambient humidity**|Operatingand storage: 35% to 85%(with no condensation)|
|**Dielectric strength**|1,000 VAC,50/60 Hz for 1 minute|
|**Vibration resistance(destruction)**|10 to 150 Hz,0.7-mm double amplitude,80 minutes,each in X,Y,and Z directions|
|**Shock resistance(destruction)**|300 m/s23 times each in six directions(up/down,left/right,forward/backward)|
|**Degree ofprotection**|IEC 60529,IP67|
|**Connection method**|Connector connection(standard cable length: 500 mm)|
|**Weight(packed state)**|Approx.160g (Sensor Head only: Approx.75g)|
|**Materials**|Case and cover: PBT(polybutylene terephtahalate),Optical window: Glass,Internal thread: Brass,Cable: PVC|
|**Accessories**|Instruction sheet,Ferrite core×1(made byTDK Corp. ZCAT1730-0730A),Laser warninglabel(English),FDA|



**Note:** False detection outside the measurement range can occur in the case of an object with high reflectance. 

- *1. Beam size: Defined as 1/e[2] (13.5 %) of the center optical intensity at the minimum value of the measurement range (effective value). False detections can occur in the case there is light leakage outside the defined region and the surroundings of the target object have a high reflectance in comparison to the target object. Correct measurements may not be obtained if the workpiece is smaller than the beam size. 

- *2. Resolution: indicates the degree of fluctuation (±3σ) of analog output when connected to the ZX2-LDA. 

   - (The measured value is given for the center distance for OMRON’s standard target object (diffuse-reflective models: white ceramic object, regular-reflective models:1/4 λ flat mirror) when the response time of the ZX2-LDA is set to 128 ms.) Indicates the repetition accuracy for when the workpiece is in a state of rest. Not an indication of distance accuracy. Resolution performance may not be satisfied in a strong electromagnetic field. 

- *3. Linearity: indicates the error with respect to the ideal straight line of the displacement output in the case of measuring Omron’ s standard target object. Linearity and measured value may vary depending on target object. F.S. indicates the full scope of the measurement range. (ZX2-LD50(L): 20 mm) 

- *4. Temperature characteristic: Value for the case the space between the sensor head and Omron’ s standard target object is secured by an aluminum jig. (Measured at the measurement center distance) 

- *5. These Sensors are classified as Class 2 laser devices for diffuse-reflective models and Class 1 for regular-reflective models under EN 608251 and the regulations of Laser Notice No. 50 for FDA certification. CDRH registration has been completed. 

**5** 

**ZX2** 

## **Amplifier Units** 

|**Item**<br>**Model**|**ZX2-LDA11**|**ZX2-LDA41**|
|---|---|---|
|**Measurementperiod*1**|Min. 30μs||
|**Response time**|60μs, 120μs, 240μs, 500μs, 1 ms, 2 ms, 4 ms, 8 ms, 12 ms, 20 ms, 36 ms, 66 ms, 128 ms, 250 ms,<br>500ms||
|**Analog output*2**|4 to 20 mA,Max. load resistance: 300Ω/±5 VDC or 1 to 5 VDC,Output impedance: 100Ω||
|**Judgement outputs**<br>**(HIGH/PASS/LOW: 3 outputs),**<br>**error output**|NPN open-collector outputs, 30 VDC, 50 mA max.<br>(residual voltage: 1 V max. for load current 10 mA<br>max.,2V max. for load current above 10 mA)|PNP open-collector outputs, 30 VDC, 50 mA max.<br>(residual voltage: 1 V max. for load current 10 mA<br>max.,2 V max. for load current above 10 mA)|
|**Laser OFF input, zero reset input,**<br>**timing input, reset input,**<br>**bank input**|ON: Short-circuited with 0-V terminal or 1.2 V or less<br>OFF: Open (leakage current: 0.1 mA max.)|ON: Supply voltage short-circuited or supply voltage<br>within -1.2 V<br>OFF: Open(leakage current: 0.1 mA max.)|
|**Functions**|Smart tuning, scaling, sample hold, peak hold, bottom hold, peak-to-peak hold, self-peak hold,<br>self-bottom hold, average hold, zero reset, On-delay timer, OFF-delay timer, keep/clamp switch,<br>(A-B) calculations*3, thickness calculation*3, mutual interference prevention*3,<br>laser deterioration detection,bank function(4 banks),differential function||
|**Indications**|Judgement indicators: HIGH (orange), PASS (green), LOW (orange), 11-segment main display (red),<br>11-segment sub-display (orange), laser ON (green), zero reset (green), enable (green), menu (green),<br>HIGH threshold(orange),LOW threshold(orange)||
|**Power supply voltage**|10 to 30 VDC,including10% ripple(p-p)||
|**Power consumption**|3,000 mW max.(at 24 VDC: 125 mA max.,at 12 VDC: 250 mA max.)||
|**Ambient temperature**|Operating: 0 to 50°C,Storage:−15 to 70°C(with no icingor condensation)||
|**Ambient humidity**|Operatingand storage: 35% to 85%(with no condensation)||
|**Dielectric strength**|1,000 VAC,50/60 Hz for 1 min.||
|**Vibration resistance(destruction)**|10 to 150 Hz,0.7-mm double amplitude,80 min. each in X,Y,and Z directions||
|**Shock resistance(destruction)**|300 m/s23 times each in six directions(up/down,left/right,forward/backward)||
|**Degree ofprotection**|IEC60529,IP40||
|**Connection method**|Prewired(standard cable length: 2 m)||
|**Weight(packed state)**|Approx. 200g (main unit only: Approx. 135g)||
|**Materials**|Case: PBT (polybutylene terephtahalate), Cover: Polycarbonate, Display: Methacrylic resin,<br>Button: Polyacetal,Cable: PVC||
|**Accessories**|Instruction sheet||



- *1. In the case of Omron’s standard target object (white ceramic) 

- *2. Select current output (4 to 20 mA) and voltage output ( ± 5V or 1 to 5V) by MENU mode. 

- *3. Calculating unit (ZX2-CAL) is necessary. Calculations are possible for up to two amplifier units. Mutual interference prevention is possible for up to five amplifier units. 

## **Calculating Unit** 

|**Item**<br>**Model**|**ZX2-CAL**|
|---|---|
|**Applicable Amplifier Units**|ZX2-LDA11,ZX2-LDA41|
|**Current consumption**|12 mA max. (supplied from the Smart<br>Sensor Amplifier Unit)|
|**Ambient temperature**|Operating: 0 to +50°C, storage: -15 to<br>+70°C(with no icingor condensation)|
|**Ambient humidity**|Operating and storage: 35% to 85%<br>(with no condensation)|
|**Connection method**|Connector|
|**Dielectric strength**|1,000 VAC,50/60 Hz for 1 minute|
|**Vibration resistance**<br>**(destruction)**|10 to 150 Hz, 0.7-mm double amplitude,<br>80 minutes,each in X,Y,and Z directions|
|**Shock resistance**<br>**(destruction)**|300 m/s23 times each in six directions<br>(up/down,left/right,forward/backward)|
|**Materials**|Case: ABS,Display: Methacrylic resin|
|**Weight (packed state)**|Approx. 50g<br>(CalculatingUnit only: Approx. 15g)|
|**Accessories**|Instruction sheet|



## **ZX2-series Communications Interface Unit** 

|**Item**<br>**Model**|**Item**<br>**Model**|**Item**<br>**Model**|**ZX2-SF11**|
|---|---|---|---|
|**Power supply voltage**|||10 to 30 V DC ±10% (including 10% ripple (p-p))<br>(Supplied from Sensor Amplifier.)|
|**Power consumption**|||720 mW max. (at 24 V: 30 mA max., at 12 V: 60 mA max.)<br>(Not including Sensor Amplifier current consumption or<br>output current|
|**Applicable Amplifier Units**|||ZX2-LDA@@ (Production after November 2013)|
|**Applicable Amplifier**<br>**Unit versions**|||Sensor Amplifier Unit version: V1.330 or higher<br>(The Sensor Amplifier version is shown on the sub-digital<br>displaywhen thepower of the Sensor Amplifier is turned ON.)|
|**Max. No. of Amplifier**<br>**Units**|||5|
|**Commu-**<br>**nications**<br>**functions**|**Port**||RS-232C(9-pin,D-Sub connector)|
||**Communications method**||Full duplex|
||**Synchronization method**||Start/stopsynchronization|
||**Transmission code**||ASCII|
||**Baud rate**||38,400(at shipping)/9,600 bps switchable|
||**Data bit length**||8 bits|
||**Parity check**||None|
||**Stop bit length**||1 bit|
||**Data**<br>**delimiter**|**Receiving**|CR or CR + LF is automaticallyrecognized.|
|||**Sending**|CR + LF fixed|
|**Indicators**|||Power supply: green, Sensor communications: green, Sensor<br>communications error: red, External terminal communications:<br>green,External terminal communications error: red|
|**Protective circuits**|||Power supplyreversepolarity protection|
|**Ambient temperature**|||Operating: 0 to 50°C, storage: -15 to 60°C<br>(with no icingor condensation)|
|**Ambient humidity**|||Operating and storage: 35% to 85%<br>(with no condensation)|
|**Insulation resistance**|||20 MΩmin.(at 500 VDC)|
|**Dielectric strength**|||1,000 VAC, 50/60 Hz for 1 min,<br>Leakage current: 10 mA max.|
|**Materials**|||Case: PBT(polybutylene terephthalate),Cover: Polycarbonate|
|**Accessories**|||Instruction sheet,2 clamps|



**6** 

**ZX2** 

**Engineering Data (Reference Value)** 

## **Angle Characteristic** 

The angle characteristic is a plot of the inclination of the sensing object in the measurement range and the maximum value of the error to analog output. **Note:** SUS304 = Stainless steel SUS304 

## **ZX2-LD50** 

## **Side-to-side Inclination** 

## **Front-to-back Inclination** 

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1.0 1.0<br>White ceramic White ceramic<br>0.8 SUS304, mirror finish 0.8 SUS304, mirror finish<br>0.6 + Inclination Black rubber 0.6 + Inclination Black rubber<br>0.4 -  Inclination 0.4 - Inclination<br>0.2 0.2<br>0 0<br>− 0.2 − 0.2<br>− 0.4 − 0.4<br>− 0.6 − 0.6<br>− 0.8 − 0.8<br>− 1.0 − 1.0<br>− 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50 − 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50<br>Angle of Inclination (°) Angle of Inclination (°)<br>ZX2-LD50L<br>Side-to-side Inclination Front-to-back Inclination<br>1.0 1.0<br>White ceramic White ceramic<br>0.8 SUS304, mirror finish 0.8 SUS304, mirror finish<br>0.6 + Inclination Black rubber 0.6 + Inclination Black rubber<br>0.4 - Inclination 0.4 - Inclination<br>0.2 0.2<br>0 0<br>− 0.2 − 0.2<br>− 0.4 − 0.4<br>− 0.6 − 0.6<br>− 0.8 − 0.8<br>− 1.0 − 1.0<br>− 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50 − 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50<br>Angle of Inclination (°) Angle of Inclination (°)<br>ZX2-LD100<br>Side-to-side Inclination Front-to-back Inclination<br>1.0 1.0<br>White ceramic White ceramic<br>0.8 SUS304, mirror finish 0.8 SUS304, mirror finish<br>Black rubber Black rubber<br>0.6 + Inclination 0.6 + Inclination<br>0.4 - Inclination 0.4 -  Inclination<br>0.2 0.2<br>0 0<br>− 0.2 − 0.2<br>− 0.4 − 0.4<br>− 0.6 − 0.6<br>− 0.8 − 0.8<br>− 1.0 − 1.0<br>− 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50 − 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50<br>Angle of Inclination (°) Angle of Inclination (°)<br>ZX2-LD100L<br>Side-to-side Inclination Front-to-back Inclination<br>1.0 1.0<br>White ceramic White ceramic<br>0.8 SUS304, mirror finish 0.8 SUS304, mirror finish<br>Black rubber Black rubber<br>0.6 + Inclination 0.6 + Inclination<br>0.4 - Inclination 0.4 -  Inclination<br>0.2 0.2<br>0 0<br>− 0.2 − 0.2<br>− 0.4 − 0.4<br>− 0.6 − 0.6<br>− 0.8 − 0.8<br>− 1.0 − 1.0<br>− 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50 − 50 − 40 − 30 − 20 − 10 0 10 20 30 40 50<br>Angle of Inclination (°) Angle of Inclination (°)<br>Error (%F.S.) Error (%F.S.)<br>Error (%F.S.) Error (%F.S.)<br>Error (%F.S.) Error (%F.S.)<br>Error (%F.S.) Error (%F.S.)<br>**----- End of picture text -----**<br>


**7** 

**ZX2** 

## **Linearity Characteristic for Different Materials** 

## **ZX2-LD50** 

|**0**°**Inclination**<br>**ZX2-LD50L**<br>**0**°**Inclination**<br>**ZX2-LD100**<br>**0**°**Inclination**<br>**ZX2-LD100L**<br>**0**°**Inclination**<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measurem<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)|**0**°**Inclination**<br>**ZX2-LD50L**<br>**0**°**Inclination**<br>**ZX2-LD100**<br>**0**°**Inclination**<br>**ZX2-LD100L**<br>**0**°**Inclination**<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measurem<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)|**0**°**Inclination**<br>**ZX2-LD50L**<br>**0**°**Inclination**<br>**ZX2-LD100**<br>**0**°**Inclination**<br>**ZX2-LD100L**<br>**0**°**Inclination**<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measurem<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)|**0**°**Inclination**<br>**ZX2-LD50L**<br>**0**°**Inclination**<br>**ZX2-LD100**<br>**0**°**Inclination**<br>**ZX2-LD100L**<br>**0**°**Inclination**<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measurem<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)|**0**°**Inclination**<br>**ZX2-LD50L**<br>**0**°**Inclination**<br>**ZX2-LD100**<br>**0**°**Inclination**<br>**ZX2-LD100L**<br>**0**°**Inclination**<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−<br>−4<br>−6<br>−8<br>−10<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measurem<br>~~FAR side~~<br>Error (%F.S.)<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−15<br>−25<br>−35<br>0° Inclination<br>Measure<br>~~FAR side~~<br>Error (%F.S.)|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|−**50**°**Inclination**<br><br>|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|**Front-to-back**<br>+**50**°**Inclination**<br><br>)|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|||||||||White|cera|mic|||1.0<br>0.8<br>or (%F.S.)||||||W||hite|ceram|ic|||1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>Error (%F.S.||||||W||hite|ceram|ic|||
|||||||<br>||SUS3<br>lack|04, m<br>rubb|irror f<br>r||inish|||||||S<br>B||US30<br>lack r|4, mi<br>ubbe|rror fi<br>r||nish|||||||S<br>B||<br>US30<br>lack|4, mi<br>ubbe|rror fi<br>r||nish|
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|||0° In|clina|tion||||||||||−5|0° I|nclina|tion||||||||||+5|0° In|clinat|ion|||||||||
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||−<br>−4<br>−6<br>−8<br>10|||||||||||||−2<br>−4<br>−6<br>−8<br>10||||0<br><br>2<br>4<br>6<br>8<br>10<br>−|||||||||0<br>−2<br>−4<br>−6<br>−8<br>10<br>2<br>4<br>6<br>8<br>10||||||||||||
||||||||||||||||||||||||||||||||||||||||
||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~|||||||
||||||−**50**°**Inclination**<br>ment center distance<br>Displacement (mm)<br>Measurem<br>0<br>2<br>2<br>4<br>6<br>8<br>10<br>White ceramic<br>SUS304, mirror finish<br>Black rubber<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>−2<br>−4<br>−6<br>−8<br>−10<br>−50° Inclination<br>Error (%F.S.)|||||||||||||**Front-to-back**<br>+**50**°**Inclination**<br>ent center distance<br>Displacement (mm)<br>Measurement center distance<br>Displacement (mm)<br>0<br><br>2<br>4<br>6<br>8<br>10<br>White ceramic<br>SUS304, mirror finish<br>Black rubber<br>1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>0<br>−2<br>−4<br>−6<br>−8<br>−10<br>2<br>4<br>6<br>8<br>10<br>+50° Inclination<br>White ceramic<br>SUS304, mirror finish<br>Black rubber<br>Error (%F.S.)|||||||||||||||||||||
|||||||||White|ceram|ic|||||||||||White|ceram|ic|||||||||W||hite|ceram|ic|||
|||||||S<br>B||US3<br>lack|04, m<br>ubbe|irror fi<br>r||nish|||||||S<br>B||US30<br>lack r|4, mi<br>ubbe|rror fi<br>r||nish|||||||<br>S<br>B||<br>US30<br>lack r|<br>4, mi<br>ubbe|<br>rror fi<br>||nish|
||||||||||||||||||||||||||||||||||||||||
||0|° Incl|inat|ion||||||||||−5|0° I|nclina|tion||||||||||+5|0° I|nclinat|ion|||||||||
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||−<br>−4<br>−6<br>−8<br>10|||||||||||||−2<br>−4<br>−6<br>−8<br>10|||||||||||||0<br>−2<br>−4<br>−6<br>−8<br>10<br>2<br>4<br>6<br>8<br>10||||||||||||
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||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~|||||||
||||||−**50**°**Inclination**<br>ment center distance<br>Displacement (mm)<br>Measurem<br><br>|||||||||||||**Front-to-back**<br>+**50**°**Inclination**<br>Displacement (mm)<br>ent center distance<br>Measurement center distance<br>Displacement (mm)<br><br>)|||||||||||||||||||||
||||||||White c||eramic||||1.0<br>0.8<br>or (%F.S.)|||||||White||ceramic||||1.0<br>0.8<br>or (%F.S.|||||||White c||eramic||||
||||||||<br>SUS30<br>Black r||<br>4, mirro<br>ubber||r finish|||||||||SUS30<br>Black r||4, mirro<br>ubber||r finish|||||||||SUS30<br>Black r||4, mirror<br>bber||finish||
||||||||||||||0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>Err|||||||||||||0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−10<br>Err|||||||||||||
||0°|Inclinati||on||||||||||−50° I||nclinat|ion||||||||||+50° In||clinat|ion|||||||||
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||−15<br>−25<br>35||||35<br>25<br>15<br>5<br>0<br>−5<br>−|||||||||−<br>−15<br>−25<br>35||||35<br>25<br>15<br>5<br>5<br>0<br>.<br>−|||||||||35<br>25<br>15<br>5<br>−5<br>−15<br>−25<br>35<br>0||||||||||||
||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~|||||||
||||||−**50**°**Inclination**<br>Displacement (mm)<br>ent center distance<br>Measurem<br><br>|||||||||||||**Front-to-back**<br>+**50**°**Inclination**<br>Displacement (mm)<br>ent center distance<br>Measurement center distance<br>Displacement (mm)<br><br>|||||||||||||||||||||
||||||||White||ceramic||||1.0<br>0.8<br>0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>Error (%F.S.)|||||||White||ceramic||||1.0<br>0.8<br>or (%F.S.)|||||||White c||eramic||||
||||||||SUS30<br>Black r||4, mirro<br> ubber||r finish|||||||||SUS30<br>Black r||4, mirro<br>ubber||r finish|||||||||SUS30<br>Black r||4, mirror<br>ubber||finish||
|||||||||||||||||||||||||||0.6<br>0.4<br>0.2<br>0<br>−0.2<br>−0.4<br>−0.6<br>−0.8<br>−1.0<br>Err|||||||||||||
||0|° Inclinat||ion||||||||||−50° I||nclinat|ion||||||||||+50° In||clinati|on|||||||||
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||−15<br>−25<br>35||||35<br>25<br>15<br>5<br>−5<br>0<br>−|||||||||−<br>−15<br>−25<br>35||||35<br>25<br>15<br>5<br>5<br>0<br>−|||||||||35<br>25<br>15<br>5<br>0<br>−5<br>−15<br>−25<br>35||||||||||||
||||||||||||||||||||||||||||||||||||||||
||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~||||||||~~FAR side~~|||||~~NEAR side~~|||||||
||Measure||||ment center distance<br>Displacement (mm)|||||||||Measurem||||ent center distance<br>Displacement (mm)|||||||||Measurement center distance<br>Displacement (mm)||||||||||||



**Note:** The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier − unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and , respectively. 

**8** 

**ZX2** 

## **Angle Characteristic** 

## **ZX2-LD50V** 

## **Side-to-side Inclination for Flat Mirror Front-to-back Inclination for Flat Mirror** 

## **Side-to-side Inclination for Silicon Wafer** 

**==> picture [480 x 296] intentionally omitted <==**

**----- Start of picture text -----**<br>
3.0 3.0 3.0<br>2.5 -1.0° 0. 5° 2.5 -1.0° 0. 5° 2.5 -1.0° 0. 5°<br>2.0 -0.5°0° 1.0° 2.0 10.5° -0.5°0° 1.0° 2.0 -0.5°0° 1.0°<br>1.5 + Inclination 1.5 + Inclination 1.5 + Inclination<br>1.0 - Inclination 1.0 - Inclination 1.0 - Inclination<br>0.5 0.5 0.5<br>0 0 0<br>-0.5 -0.5 -0.5<br>-1.0 -1.0 -1.0<br>-1.5 -1.5 -1.5<br>-2.0 -2.0 -2.0<br>-2.5 -2.5 -2.5<br>-3.0-5 -4 -3 -2 -1 0 1 2 3 4 5 -3.0-5 -4 -3 -2 -1 0 1 2 3 4 5 -3.0-5 -4 -3 -2 -1 0 1 2 3 4 5<br>FAR side NEAR side FAR side NEAR side FAR side NEAR side<br>Measurement center distance Measurement center distance Measurement center distance<br>Displacement (mm) Displacement (mm) Displacement (mm)<br>Front-to-back Inclination for Silicon Wafer Side-to-side Inclination for Glass Front-to-back Inclination for Glass<br>3.0 3.0 3.0<br>2.5 -1.0 ° 0. 5° 2.5 -1.0 ° 0. 5° 2.5 -1.0 ° 0. 5°<br>2.0 10.5° -0.5° 0° 1.0° 2.0 -0.5° 0° 1.0° 2.0 10.5° -0.5° 0° 1.0°<br>1.5 + Inclination 1.5 + Inclination 1.5 + Inclination<br>1.0 - Inclination 1.0 - Inclination 1.0 - Inclination<br>0.5 0.5 0.5<br>0 0 0<br>-0.5 -0.5 -0.5<br>-1.0 -1.0 -1.0<br>-1.5 -1.5 -1.5<br>-2.0 -2.0 -2.0<br>-2.5 -2.5 -2.5<br>-3.0-5 -4 -3 -2 -1 0 1 2 3 4 5 -3.0-5 -4 -3 -2 -1 0 1 2 3 4 5 -3.0-5 -4 -3 -2 -1 0 1 2 3 4 5<br>FAR side NEAR side FAR side NEAR side FAR side NEAR side<br>Measurement center distance Measurement center distance Measurement center distance<br>Displacement (mm) Displacement (mm) Displacement (mm)<br>Error (%F.S.) Error (%F.S.) Error (%F.S.)<br>Error (%F.S.) Error (%F.S.) Error (%F.S.)<br>**----- End of picture text -----**<br>


## **Front-to-back Inclination for Silicon Wafer** 

## **Front-to-back Inclination for Glass** 

## **Linearity Characteristic for Different Materials** 

## **ZX2-LD50V 0° Inclination** 

**==> picture [140 x 141] intentionally omitted <==**

**----- Start of picture text -----**<br>
1.0<br>0.8 Flat MirrorSilicon Wafer<br>0.6 10.5° Glass<br>0.4 0° Inclination<br>0.2<br>0<br>-0.2<br>-0.4<br>-0.6<br>-0.8<br>-1.0<br>-5 -4 -3 -2 -1 0 1 2 3 4 5<br>FAR side NEAR side<br>Measurement center distance<br>Displacement (mm)<br>Error (%F.S.)<br>**----- End of picture text -----**<br>


**Note:** The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier − unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and , respectively. 

**9** 

**ZX2** 

## **Beam Size Spot Beams** 

**==> picture [61 x 78] intentionally omitted <==**

**----- Start of picture text -----**<br>
L<br>Beam cross-section<br>Y<br>X<br>**----- End of picture text -----**<br>


**==> picture [32 x 36] intentionally omitted <==**

## **ZX2-LD50** 

|**L***|+**10 mm**|**0 mm**|−**4 mm**|−**10 mm**|
|---|---|---|---|---|
|**X**|Approx.<br>600μm|Approx.<br>160μm|Approx.<br>40μm|Approx.<br>220μm|
|**Y**|Approx.<br>350μm|Approx.<br>90μm|Approx.<br>60μm|Approx.<br>130μm|
|**ZX2-LD100**|||||
|**L***|**+35 mm**|**0 mm**|−**20 mm**|−**35 mm**|
|**X**|Approx.<br>1.1 mm|Approx.<br>400μm|Approx.<br>70μm|Approx.<br>250μm|
|**Y**|Approx.<br>550μm|Approx.<br>190μm|Approx.<br>110μm|Approx.<br>150μm|



## **Line Beams** 

**==> picture [58 x 75] intentionally omitted <==**

**----- Start of picture text -----**<br>
L<br>Beam cross-section<br>Y<br>X<br>**----- End of picture text -----**<br>


**==> picture [32 x 37] intentionally omitted <==**

## **ZX2-LD50L** 

|**L***|+**10 mm**|**0 mm**|−**4 mm**|−**10 mm**|
|---|---|---|---|---|
|**X**|Approx.<br>2.6 mm|Approx.<br>2.6 mm|Approx.<br>2.6 mm|Approx.<br>2.6 mm|
|**Y**|Approx.<br>350μm|Approx.<br>90μm|Approx.<br>60μm|Approx.<br>130μm|
|**ZX2-LD100L**|||||
|**L***|**+35 mm**|**0 mm**|−**20 mm**|−**35 mm**|
|**X**|Approx.<br>2.1 mm|Approx.<br>2.5 mm|Approx.<br>2.7 mm|Approx.<br>2.9 mm|
|**Y**|Approx.<br>550μm|Approx.<br>190μm|Approx.<br>110μm|Approx.<br>150μm|



- Measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center − 

- distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and , respectively. 

## **I/O Circuit Diagrams** 

**NPN Amplifier Unit (ZX2-LDA11)** 

## **PNP Amplifier Unit (ZX2-LDA41)** 

**==> picture [512 x 358] intentionally omitted <==**

**----- Start of picture text -----**<br>
Brown: 10 to 30 VDC  Brown: 10 to 30 VDC<br>Load<br>White: HIGH judgement output Load White: HIGH judgement output 10 to<br>Green: PASS judgement output Load Load Green: PASS judgement output 30 VDC<br>10 to<br>Gray: LOW judgement output 30 VDC Gray: LOW judgement output Load<br>Yellow: Error output Yellow: Error output Load<br>Load<br>Load<br>Blue: GND (0 V) Blue: GND (0 V)<br>Pink: LD-OFF input Pink: LD-OFF input<br>Orange: Zero reset input Orange: Zero reset input<br>Purple: Timing input/BANK input 0 Purple: Timing input/BANK input 0<br>Red: Reset input/BANK input 1 Red: Reset input/BANK input 1<br>Current output Current output<br>4 to 20 mA 4 to 20 mA<br>Current/voltage Black: Analog output Current/voltage Black: Analog output<br>output switch100  Ω Voltage output±5 V1 to 5 V Shield: Analog GND Load Current output: 300 Voltage output: 10 k ΩΩ  or lower or higher output switch100  Ω Voltage output±5 V1 to 5 V Shield: Analog GND Load Current output: 300 Voltage output: 10 k ΩΩ  or lower or higher<br>Wiring<br>Amplifier Units<br>ZX2-LDA11/ZX2-LDA41<br>Brown<br>10 to 30 VDC<br>Blue<br>White GND (0V) Note: 1. Use a separate stabilized power supply for the Amplifier Unit,<br>Green HIGH judgement output particularly when high resolution is required.<br>Gray PASS judgement output 2. Wire the Unit correctly. Incorrect wiring may result in damage to the<br>LOW judgement output<br>Yellow Unit. (Do not allow wiring, particularly the Analog output, to come<br>Error output<br>Black Analog output into contact with other wires.)<br>Shield Analog GND 3. Use the 0-V ground (blue) for the power supply and use the Analog<br>Pink<br>LD-OFF input ground (shield) for Analog output. Each of these grounds must be<br>Orange<br>Purple Zero reset input used for the designed purpose. When not using the Analog output,<br>Red Timing input/BANK input 0 connect the Analog ground (shield) to the 0-V ground (blue).<br>Reset input/BANK input 1<br>Internal circuits Internal circuits<br>**----- End of picture text -----**<br>


**10** 

**ZX2** 

## **Safety Precautions** 

**For details, refer to common precautions, warranty, limitation of liability, and other related information.** 

Precautions for Correct Use and Other Details Refer to the “ **Smart Sensors Laser Displacement Sensors CMOS Type ZX2 Series User’s Manual”** (Cat. No. Z310). ~~Ce~~ **(Unit: mm)** 

## **WARNING** 

**This product is not designed or rated for ensuring safety of persons. Do not use it for such purposes.** 

## **Dimensions** 

**Tolerance class IT16 applies to dimensions in thes data sheet unless otherwise specified.** 

## **Units** 

**==> picture [505 x 191] intentionally omitted <==**

**----- Start of picture text -----**<br>
Sensor Heads<br>Reference surface<br>ZX2-LD50 ———<br>ZX2-LD50L (9.7)<br>ZX2-LD100 Emitter axis<br>ZX2-LD100L 22.6 Reference surface Mounting Dimensions<br>ZX2-LD50V 9.710.1 Emitter L * 4 27.5 35.5 Two, 3.2-dia. (Mounting holes)Reference surface Range indicator Mounting reference surface Two, M3<br>axis 6 4±0.05<br>10.5 7 A* 7 4 4.8 20.9 Mounting reference surface<br>35.3<br>39.5 47.5 43.5±0.05<br>16.7 Receiver axis<br>4.8<br>e et Emitter center “ YEH a i hdia Range indicator 1|<br>1 5.1<br>Laser<br>28.43 warning light 4±0.05<br>, oo an 31.5±0.05<br>12.6 dia.<br>Note: Attach the enclosed<br>ferrite core (16.5 dia.,<br>* In the case of ZX2-LD100 (L), L=100, A=11.5 In the case of ZX2-LD50 (L), L=50, A=21  ° ° 29.8 Standard length: 0.5 m, Minimum bending radius: 30 mmVinyl insulated round robot cable, 4.7 dia., 4 conductors(Conductor cross-section: 0.086 mm [2] /Insulator diameter: 0.9 mm) length: 30 mm) to the cable within 100 mm from the Sensor Head.<br>**----- End of picture text -----**<br>


**Amplifier Units ZX2-LDA11 ZX2-LDA41** 

**==> picture [481 x 133] intentionally omitted <==**

**----- Start of picture text -----**<br>
11.7 18<br>ZX2-LDA41<br>*2<br>6.2 72<br>(when cover open, 84.6)<br>30 47.6 4.2<br>*1. Maximum height when cover open: 56 9.6<br>*2. Minimum length when connected: 50 50 34.2 10.9 16.6 38.4  *1<br>16.9 15.4<br>6.1<br>20.7 36.8<br>Vinyl insulated round cable,5.2 dia., 11 conductors<br>( = = L (Conductor cross-section 0.09 mm [2] /Insulator diameter: 0.7 mm)<br>Note :  The analog output line (black) has double shielding and<br>the diameter of the insulator is 2.3 mm.<br>Standard length: 2 m, Minimum bending radius: 30 mm<br>**----- End of picture text -----**<br>


**11** 

**ZX2** 

## **Accessories (sold separately)** 

**Calculating Unit Sensor Head Extension Cables ZX2-CAL** ~~24.9~~ **ZX2-XC1R ZX2-XC4R** Coupled indicators **ZX2-XC9R** Coupling connectors **ZX2-XC20R** 15.1 ~~12 57~~ 12.6 dia. ~~29.8 L * 28.9~~ 12 dia. ~~44.05~~ 8 9.5 Amplifier Unit Sensor Head ~~:~~ 30 3.4 ~~5;~~ 15 attachment connector(female, 6 poles) ~~=———$Laa~~ Vinyl insulated round robot cable, 4.7 dia.(ZX2-XC20R: 5.1 dia.) attachment connector(male, 6 poles) 14.4 T ~~tee~~ * Length L is as follows. ~~ee 5 36.7~~ ZX2-XC1R: 1 m, ZX2-XC4R: 4 m, ZX2-XC9R: 9 m, ZX2-XC20R: 20 m 

* Length L is as follows. ZX2-XC1R: 1 m, ZX2-XC4R: 4 m, ZX2-XC9R: 9 m, ZX2-XC20R: 20 m Minimum bending radius: 30 mm 

**Note:** Attach the enclosed ferrite cores (16.5 dia., length: 30 mm) within 100 mm of each end of the extension cable. 

**ZX2-series Communications Interface Unit ZX2-SF11** 

**==> picture [318 x 224] intentionally omitted <==**

**----- Start of picture text -----**<br>
Coupling<br>Sensor communications indicator (communications operation) connector<br>Sensor communications indicator (communications error)<br>a s W A WE<br>Power supply indicator External terminal<br>External terminal communications indicator (communications error) communications indicator<br>(communications operation)<br>4.2 64.3 4.2<br>an 30 3<br>(336)<br>(46)<br>15 31.5<br>— 13.2 Vinyl -insulated round cable,  E 13 t 36.8 i<br>5.23 dia. Standard length 100 mm 29<br>2.2<br>_ 11.7 —_ 4.3<br>(33.1) 11.7<br>4 tA= p ll_<br>Connector<br>3 5 6.55<br>**----- End of picture text -----**<br>


**12** 

**ZX2** 

## **Mounting Bracket** 

**E39-L178** 

**==> picture [200 x 173] intentionally omitted <==**

**----- Start of picture text -----**<br>
Mounting Bracket Nut plate<br>31.4(36.4) 5 6 2-M3<br>2-R3 P=0.5<br>5<br>58 54.1 48.1<br>3.5<br>23<br>24.5°(Regular-reflective  Material: Stainless steel<br>Sensor mounting) (SUS304)<br>34.7°(Diffuse-reflective  Thickness: 2.0 mm<br>Sensor mounting)<br>8.8 3.2 14<br>12 fi ~h<br>3.2 aE 2-R3 Material: Stainless steel (SUS304)Thickness: 3.0 mm<br>5.2 te 9.6 16.8 Accessories: Phillips screws (M3×30): 2                     Nut plate: 1<br>( 26.4)16.8<br>3.2 dia.<br>R48.1<br>**----- End of picture text -----**<br>


## **Installation Method for Regular-reflective Sensor Head Using a E39-L178 Mounting Bracket:** 

**==> picture [231 x 221] intentionally omitted <==**

**----- Start of picture text -----**<br>
(32)<br>* [1 ] Phillips screws 22.6<br>4<br>ie\_ © ‘ras<br>Nut plate<br>\ ,<br>al | =|<br>eS, Gat! Mounting Bracket<br>* [2]<br>we 6G<br>Note: When securing the Sensor Head in the<br>_ Mounting Bracket, insert the screws into<br>the side of the Sensor Head where the<br>warning label is located and secure the<br>Sensor Head into place.<br>*1. The measurement distance reference<br>position is the end of the Mounting Bracket.<br>I— *2. For the Regulalr-reflective Sensor Heads,<br>rotate the Sensor Head counterclockwise,<br>secure it in place, and then perform any<br>necessary fine adjustments.<br>10.5°<br>**----- End of picture text -----**<br>


**Note:** When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. 

- *1. The measurement distance reference position is the end of the Mounting Bracket. 

## **Mounting Bracket** 

**E39-L179** 

**==> picture [200 x 188] intentionally omitted <==**

**----- Start of picture text -----**<br>
Mounting Bracket Nut plate<br>(36.6)31.6 5 6 2-M3<br>P=0.5<br>2-R3<br>5<br>56 54.1 48.1<br>3.5<br>23<br>Sensor mounting)29.2°(Regular-reflective  Material: Stainless steel<br>34.7°(Diffuse-reflective  (SUS304)<br>Sensor mounting) Thickness: 2.0 mm<br>8.8 3.2 14<br>12<br>fh comet Se<br>3.2 td 2-R3 Material: Stainless steel (SUS304)Thickness: 3.0 mm<br>5.2 LS 9.6 16.8 Accessories: Phillips screws (M3×30): 2                     Nut plate: 1<br>( 26.4)16.8<br>*Use this Mounting Bracket when installing the ZX2-LD100 (L) as a normal<br>Diffuse-reflective or Regular-reflective Sensor Head.<br>3.2 dia.<br>R48.1<br>**----- End of picture text -----**<br>


**Installation Method for Regular-reflective Sensor Heads (Installing a Diffuse-reflective Sensor Head as a Regular-reflective Sensor Head) Using a E39-L179 Mounting Bracket:** 

**==> picture [245 x 158] intentionally omitted <==**

**----- Start of picture text -----**<br>
* [1 ] Phillips screws 22.6(32)<br>fai T<br>a<br>Fa} Nut plate<br>i a<br>* [2] Mounting Bracket<br>oa<br>wero ©<br>Note: When securing the Sensor Head in the<br>Mounting Bracket, insert the screws into the<br>side of the Sensor Head where the warning<br>label is located and secure the Sensor Head<br>into place.<br>5.75°<br>**----- End of picture text -----**<br>


- *1. The measurement distance reference position is the end of the Mounting Bracket. 

- *2. For the IInstalling a Diffuse-reflective Sensor as a Regular-reflective Sensor, rotate the Sensor Head counterclockwise, secure it in place, and then perform any necessary fine adjustments. 

## **Not Using a Mounting Bracket:** 

Tilt the Sensor Head towards the workpiece as shown below. 

**==> picture [236 x 136] intentionally omitted <==**

**----- Start of picture text -----**<br>
79.4±0.05<br>—_ Measurement  48 —<br>center distance<br>as —— | \<br>(43.85)<br>ots<br>i\<br>|\<br>i\<br>workpiece i| (19.85)<br>— Adjust the installation so that the angle is 10.5° ±0.1°.<br>i 10.5° | * [The mounting hole dimensions in parentheses ]<br>±0.1° (reference values) are for when the Sensor is<br>installed at 10.5°.<br>**----- End of picture text -----**<br>


**13** 

**ZX2** 

## **Installation Method for Diffuse-reflective Sensor Heads Using a E39-L178, E39-L179 Mounting Bracket:** 

## **Not Using a Mounting Bracket:** 

Mount the Sensor Head in relation to the workpiece as shown below. 

**==> picture [442 x 173] intentionally omitted <==**

**----- Start of picture text -----**<br>
* [1 ] Phillips screws 22.6 (32)<br>L* 31.5<br>oS (Fn Measurement  ±0.05<br>center distance<br>Nut plate _ | |<br>S on iso.| ! 39.5±0.05 |<br>‘a Mounting Bracket<br>4.0<br>er © workpiece ±0.05<br>== * [1] [The measurement distance reference position is ]<br>the Sensor’s sensing surface. *  [ZX2-LD50 (L): 50]<br>   ZX2-LD100 (L): 100<br>ien<br>**----- End of picture text -----**<br>


**==> picture [143 x 36] intentionally omitted <==**

**----- Start of picture text -----**<br>
Note: When securing the Sensor Head in the<br>Mounting Bracket, insert the screws<br>into the side of the Sensor Head where<br>the warning label is located and secure<br>the Sensor Head into place.<br>**----- End of picture text -----**<br>


**14** 

## Terms and Conditions Agreement 

## Read and understand this catalog. 

Please read and understand this catalog before purchasing the products.  Please consult your OMRON representative if you have any questions or comments. 

## Warranties. 

(a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron disclaims all other warranties, express or implied. 

(b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE 

PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. 

Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the Products or otherwise of any intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at Omron’s election, to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty, repair, indemnity or any other claims or expenses regarding the Products unless Omron’s analysis confirms that the Products were properly handled, stored, installed and maintained and not subject to contamination, abuse, misuse or inappropriate modification. Return of any Products by Buyer must be approved in writing by Omron before shipment. Omron Companies shall not be liable for the suitability or unsuitability or the results from the use of Products in combination with any electrical or electronic components, circuits, system assemblies or any other materials or substances or environments. Any advice, recommendations or information given orally or in writing, are not to be construed as an amendment or addition to the above warranty. 

See http://www.omron.com/global/ or contact your Omron representative for published information. 

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## Suitability of Use. 

Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product with respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases. 

NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. 

## Programmable Products. 

Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence thereof. 

## Performance Data. 

Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate it to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability. 

## Change in Specifications. 

Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change part numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for your application. Please consult with your Omron’s representative at any time to confirm actual specifications of purchased Product. 

## Errors and Omissions. 

Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical or proofreading errors or omissions. 

**In the interest of product improvement, specifications are subject to change without notice.** 

## **OMRON Corporation** 

## **Industrial Automation Company** 

2019.11 

**http://www.ia.omron.com/** 

(c)Copyright OMRON Corporation 2019 All Right Reserved.