SP160

## SP Series 

## Differential Low Pressure Sensors 

## Spirometry Applications 

- Highly integrated sensor with ADC and DSP 

- Programmable ranges from ±250 Pa to ±40 kPa 

- 16 bit resolution each range 

- Ultra low noise, 19+ bit Effective Resolution 

- Selectable Bandwidth Filter from 25Hz to 250Hz 

- Z‐Track™ virtually eliminates zero drift 

- Very High Accuracy +/‐ 0.1% of Selected Range 

- Long Term Stability +/‐ 0.1% FSS/year 

- Enhanced EMI Immunity 

- Output Update Rate of 500Hz 

- Temperature Compensated 0°C to 50°C 

- Supply Voltage Compensation 

- Standard I[2] C and SPI Interface 

## Product Summary 

Superior’s SP Series low pressure sensor module family employs _NimbleSense_ ™ a proprietary architecture achieving very high dynamic range to create the industry’s highest performing Spirometry pressure sensing device.   This wider dynamic range is ideally suited to offer precise near zero measurements to support the demanding functional requirements of the Spirometry market. Selectable multiple pressure ranges are now supported in a single package. The SP110/SP210 can be user programmed to ±250, 500, 1k and 2.5k Pa full scale ranges while the SP160 is programmable to ±5, 10, 20 and 40 kPa ranges. 

The SP Series family provides a new level of sensor integration into the Spirometry market combining an advanced piezoresistive sensing 

element with integrated amplification, ADC, DSP and processor intelligence to greatly simplify customer integration efforts.  The SP Series leverages floating point technology to provide a highly precise digital output.  This precision, when combined with the enhanced zero point and the industry’s best positional immunity enables the ultimate in Spirometry system sensing performance.  The SP Series optimizes performance, reliability and system cost for the challenging Spirometry market. 

Industry leading accuracy performance ‐ The SP Series measures dry air and non‐aggressive gas pressure with very high accuracy better than 0.10% FS and Total Error Band is also industry leading which is typically better than 0.15% FSS. 

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DS‐0002D.DOCX 

## SP Series 

## Differential Low Pressure Sensors 

## Table of Contents 

|1|Maximum Ratings ................................................................ 2|
|---|---|
|2|Suggested Operating Conditions ......................................... 2|
|3|Environmental ..................................................................... 2|
|4|Equivalent Circuit ................................................................. 2|
|5|Feature List .......................................................................... 3|
|6|Performance Characteristics ............................................... 3|
|7|Electrical Characteristics ...................................................... 4|
||7.1 Supply Characteristics ................................................. 4|
||7.2 Reset Characteristics .................................................. 4|
||7.3 DAV Characteristics .................................................... 4|
||7.4 SPI Characteristics ...................................................... 5|
||7.5 I2C Characteristics ....................................................... 5|
|8|Materials .............................................................................. 5|
||8.1 Wetted Materials ........................................................ 5|
||8.2 Material Compliance .................................................. 6|
|9|System Overview ................................................................. 6|
|10|Interface .............................................................................. 7|
||10.1 Reset ........................................................................... 7|
||10.2 Communication Interface Selection ........................... 7|
||10.3 SPI Interface ................................................................ 7|
||10.4 I2C Interface ................................................................ 8|
||10.4.1 I2C Address ....................................................... 8|
||10.4.2 I2C Communications Model ............................. 8|
||10.4.3 I2C Clock Stretching .......................................... 9|
||10.4.4 I2C Bus Compatibility ........................................ 9|
||10.5 Extended Data Acquisition ......................................... 9|
||10.5.1 Available Extended Data .................................. 9|
||10.5.2 SPI Extended Data Read ................................... 9|
||10.5.3 I2C Extended Data Read ................................... 9|
||10.6 Control Registers ...................................................... 10|
||10.6.1 Mode Control Register ................................... 10|
||10.6.2 Rate Control Register ..................................... 11|
||10.7 Computing Pressure ................................................. 11|
|11|Mechanical and Manufacturing ......................................... 12|
||11.1 Package Dimensions ................................................. 12|
||11.2 Suggested Pad Layout ............................................... 12|
||11.3 Pinout ....................................................................... 13|
||11.4 Reflow Soldering and Handling Conditions .............. 13|
||11.5 Pick and Place Pick‐up Zone ..................................... 13|
||11.6 Packaging Options .................................................... 14|
||11.6.1 Tray Packaging ............................................... 14|
||11.6.2 Tape and Reel ................................................ 15|
||11.7 Part Identification ..................................................... 16|
|12|Ordering Information ........................................................ 16|
|13|Packaging Labeling............................................................. 16|
|14|Revisions ............................................................................ 17|
|15|Warranty ............................................................................ 17|



## 1 Maximum Ratings 

|**Parameter**|**Sym**|**Min**|**Max**|**Units**|
|---|---|---|---|---|
|Supply Voltage|VDDM|Gnd‐0.3|4.0|V|
|Voltage on I/O Pins<br>VDD> 3.3V<br>VDD≤ 3.3V|VIOML<br>VIOMH|Gnd‐0.3<br>Gnd‐0.3|5.8<br>VDD+2.5|V<br>V|
|I/O Current|IIOM|‐25|25|mA|



## 2 Suggested Operating Conditions 

|**Parameter**|**Sym**|**Min**|**Max**|**Units**|
|---|---|---|---|---|
|Supply Voltage|VDDOP|2.8|3.5|V|
|Temperature|TA|0|50|°C|



## 3 Environmental 

|**Parameter**|**Sym**|**Min**|**Max**|**Units**|
|---|---|---|---|---|
|Temperature Range<br>Compensated<br>Operating<br>Storage|TCMP<br>TOP<br>TSTG|0<br>‐20<br>‐40|50<br>85<br>85|°C<br>°C<br>°C|
|Humidity<br>(Non‐condensing)|RHOP|0|95|% RH|
|Vibration<br>(10Hz‐2kHz)|GVIBE|‐|15|g|
|Shock (6 ms)|GSHOCK|‐|100|g|
|Life|CYLIFE|1M|‐|Pressure<br>Cycles|



## 4 Equivalent Circuit 

**==> picture [255 x 103] intentionally omitted <==**

**----- Start of picture text -----**<br>
DAV DAV<br>nRST nRST<br>PLOW Port A PLOW Port A<br>MISO/SDA MISO/SDA<br>PHIGH Port B Sensor MOSI/SCL PHIGH Port B Sensor MOSI/SCL<br>(SPI) SCK (I [2] C) SCK VI2C Address<br>nSS nSS<br>VDD VDD<br>Gnd Gnd<br>FIG‐0026C<br>**----- End of picture text -----**<br>


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DS‐0002D.DOCX 

## SP Series 

## Differential Low Pressure Sensors 

## 5 Feature List 

|**Parameter**<br>~~ee~~|**Sym**<br>~~ee~~<br>~~a~~|**SP110**<br>~~ee~~|**SP210**<br>~~ee~~<br>~~eee~~|**SP160**<br>~~ee~~<br>~~eee~~|**Units**<br>~~ee~~<br>~~eee~~|**Notes**<br>~~ee~~<br>~~eee~~|
|---|---|---|---|---|---|---|
|Programmable FS Pressure Ranges|PNUM<br>~~a~~|4<br>~~eee~~|||Each<br>~~eee~~|~~eee~~|
|Programmable FS Range Extents<br>~~a~~|PEXT<br>~~a~~<br>~~ns~~|±250 to ±2.5k<br>±1.0 to ±10<br>~~a~~|±250 to ±2.5k<br>±1.0 to ±10|±5k to ±40k<br>±20 to ±160|Pa<br>inH2O||
|Programmable BW Filter Corners<br>~~ee~~|BWNUM<br>~~ee~~<br>~~ns~~<br>~~Gs~~|8<br>~~ee~~|||Each<br>~~ee~~|~~ee~~|
|BW Corner Frequency Extents<br>~~ee~~<br>~~a~~|fBWEXT<br>~~ns~~<br>~~ee~~<br>~~Gs~~<br>~~Gy~~|25 to 250<br>~~ee~~<br>~~es~~|||Hz<br>~~ee~~|~~ee~~|
|Common Mode Pressure<br>~~ee~~<br>~~a~~|PCM<br>~~Gs~~<br>~~ee~~<br>~~Gy~~<br>~~es~~|500<br>~~ee~~<br>~~es~~<br>~~ns~~|500<br>~~ee~~|500<br>~~ee~~|inH2O<br>~~ee~~|1<br>~~ee~~|
|Proof Pressure<br>~~a~~|PPROOF<br>~~Gy ~~<br>~~es~~<br>~~Ps~~|40<br> ~~es~~<br>~~ns~~|40|1000|inH2O|2|
|Burst Pressure<br>~~ee~~|PBURST<br>~~es~~<br>~~ee~~<br>~~Ps~~|120<br>~~ns~~<br>~~ee~~|120<br>~~ee~~|3000<br>~~ee~~|inH2O<br>~~ee~~|3<br>~~ee~~|



1) Pressure applied to both ports simultaneously without incurring part damage. 

2) Pressure at which the sensor will not suffer permanent damage. 

3) Pressure if exceeded could cause permanent damage to the sensor. 

## 6 Performance Characteristics 

|**Parameter**<br>~~ee~~<br>~~a~~|**Sym**<br>~~CT~~<br>~~ee~~|**SP210**<br>~~CT~~<br>~~eres cere~~cere|**SP110**<br>~~—OSCSCsSz~~<br>~~cere ees eres~~|**SP160**<br>~~—OSCSCsSz~~<br>~~eres~~|**Units**|**Notes**|
|---|---|---|---|---|---|---|
|||**Min**<br>**Typ**<br>**Max**<br>~~CT~~<br> ~~eres cere~~cere|**Min**<br>**Typ**<br>**Max**<br>~~—OSCSCsSz~~<br>~~cere ees eres~~|**Min**<br>**Typ**<br>**Max**<br>~~—OSCSCsSz~~<br>~~eres~~|||
|Accuracy<br><br>~~a~~<br>~~es~~|PACC<br> <br>~~e~~<br>~~es es~~|‐<br>0.05<br>0.1<br> ~~eres cere~~cere <br>~~es~~|‐<br>0.05<br>0.1<br> ~~cere ees eres~~|‐<br>0.05<br>0.1<br>~~eres~~|% RNG|1|
|Total Error Band<br>~~es~~<br>~~es~~|TEB<br>~~es es~~<br>~~es es~~|‐<br>0.05<br>0.15<br>~~es~~<br>~~es~~|‐<br>0.1<br>0.3|‐<br>0.1<br>0.3|% FSS|2|
|Long Term Stability<br>~~es~~<br>~~es~~<br>~~es~~|LTS<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>0.05<br>0.1<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>0.1<br>0.25|‐<br>0.1<br>0.25|% FSS/Yr||
|Thermal Hysteresis<br>~~es~~<br>~~es~~<br>~~es~~|THYS<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>0.025<br>‐<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>0.05<br>‐|‐<br>0.05<br>‐|% FSS||
|Pressure Hysteresis<br>~~es~~<br>~~es~~<br>~~es~~|PHYS<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>0.05<br>‐<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>0.05<br>‐|‐<br>0.05<br>‐|% RNG|1|
|Position Sensitivity<br>~~es~~<br>~~es~~<br>~~es~~|PPS<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>0.25<br>‐<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>2.0<br>‐|‐<br>2.0<br>‐|Pa||
|Supply Rejection<br>~~es~~<br>~~es~~<br>~~es~~|PSR<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>0.0005<br>‐<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>0.0005<br>‐|‐<br>0.005<br>‐|Pa/mV||
|Resolution<br>~~es~~<br>~~es~~<br>~~es~~|RES<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>16<br>‐<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>16<br>‐|‐<br>16<br>‐|bit|3|
|System ENOB<br>~~es~~<br>~~es~~<br>~~es~~|ENOB<br>~~es es~~<br>~~es es~~<br>~~es es~~|‐<br>18<br>‐<br>~~es~~<br>~~es~~<br>~~es~~|‐<br>18<br>‐|‐<br>18<br>‐|Bit|4|
|Data Update Rate<br>~~es~~<br>~~es~~|fUPDATE<br>~~es es~~<br>~~es es~~|485<br>498<br>512<br>~~es~~<br>~~es~~|485<br>498<br>512|485<br>498<br>512|Hz|5|



1) Percentage of selected range. 

2) Includes errors of offset, span and thermal effects. 

3) Each of programmable range has the specified resolution. 

4) ENOB stated for fBW set to 25 Hz, with Z‐Track™ active. 

5) The internal update rate is fixed and does not change with range or filter settings. Sampling at lower data rates are possible provided the Nyquist frequency is observed. It is suggested to sample at least 2x the set fBW frequency. 

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DS‐0002D.DOCX 

## SP Series 

## Differential Low Pressure Sensors 

## 7 Electrical Characteristics 

## 7.1 Supply Characteristics 

|**Parameter**|**Sym**|**SP210**|**SP110**|**SP160**|**Units**|**Notes**|
|---|---|---|---|---|---|---|
|||**Min**<br>**Typ**<br>**Max**|**Min**<br>**Typ**<br>**Max**|**Min**<br>**Typ**<br>**Max**|||
|Supply Current|IDD|‐<br>6.0<br>6.5|‐<br>5.0<br>5.5|‐<br>5.0<br>5.5|mA||
|Supply Capacitance|CDD|‐<br>10<br>‐|‐<br>10<br>‐|‐<br>10<br>‐|uF|1|



1) Supply capacitance is provided within the part however it is recommended to include a 0.1 uF decoupling cap near the supply pads. 

## 7.2 Reset Characteristics 

|**Parameter**<br>~~S|~~|**Sym**<br>~~S|~~|**Condition**<br>~~S|~~|**SP210/ SP110/ SP160**<br>~~S|~~|**Units**<br>~~S|~~|**Notes**<br>~~S|~~|
|---|---|---|---|---|---|
||||**Min**<br>**Typ**<br>**Max**<br>~~S|~~|||
|Power‐On Reset<br>Threshold<br>~~S|~~<br>~~a ~~<br>~~a~~|VPORR<br>VPORF<br>~~S|~~<br> ~~ee~~<br>~~ee~~|Rising Voltage on VDD<br>FallingVoltage on VDD<br>~~S|~~<br>~~ee~~<br>~~ee~~|‐<br>0.75<br>1.4<br>‐<br>‐<br>1.36<br>~~S|~~<br>~~ee~~<br>~~ee~~|V<br>V<br>~~S|~~<br>~~ee~~<br>~~ee~~|~~S|~~<br>~~ee~~<br>~~ee~~|
|Interface Detect<br>Delay<br>~~a~~<br>~~a~~|tIOD<br>~~ee~~<br>~~ee ee~~|From POR or External<br>Reset<br>~~ee~~<br>~~ee~~|‐<br>‐<br>40<br>~~ee~~<br>~~ee~~|ms<br>~~ee~~<br>~~ee~~|~~ee~~<br>~~ee~~|
|First Response<br>SettlingTime<br>~~a~~<br>~~a~~<br>~~ee~~|tFRD<br>~~ee~~<br>~~ee ee~~<br>~~es~~|From POR or External<br>Reset<br>~~ee~~<br>~~ee~~|‐<br>‐<br>60<br>~~ee~~<br>~~ee~~|ms<br>~~ee~~<br>~~ee~~|1<br>~~ee~~<br>~~ee~~|
|External Reset Low<br>~~a~~<br>~~ee~~<br>~~ee~~|tRSTL<br>~~ee ee~~<br>~~es~~<br>~~es~~|~~ee~~|15<br>‐<br>‐<br>~~ee~~|us<br>~~ee~~|~~ee~~|
|Input High Voltage<br>~~ee~~<br>~~ee~~<br>~~ee~~|VIH<br>~~es~~<br>~~es~~||VDD‐0.6<br>‐<br>‐||2|
|Input Low Voltage<br>~~ee ~~<br>~~ee~~<br>~~ee~~|VIL<br> ~~es~~<br>~~ee~~|~~ee~~|‐<br>‐<br>0.6<br>~~ee~~|~~ee~~|2<br>~~ee~~|
|Internal Pull‐Up<br>Current<br>~~ee~~<br>~~ee~~<br>~~ee ee~~|IPU<br>~~ee~~<br>~~ee~~|VIN= 0V<br>~~ee~~|‐<br>‐10<br>‐30<br>~~ee~~|uA<br>~~ee~~|2<br>~~ee~~|
|Input Capacitance<br>~~ee ~~<br>~~ee ee~~|CIN<br> ~~ee~~<br>~~ee~~|~~ee~~|‐<br>7<br>‐<br>~~ee~~|pF<br>~~ee~~|2<br>~~ee~~|



1) The filter settling time to ensure the first reading is completely settled. 

2) Input nRST 

## 7.3 DAV Characteristics 

|**Parameter**|**Sym**|**Condition**|**SP210/ SP110/ SP160**|**Units**|**Notes**|
|---|---|---|---|---|---|
||||**Min**<br>**Typ**<br>**Max**|||
|Output High Voltage|VOH|IO= ‐3 mA|VDD‐0.7<br>‐<br>‐|V||
|Output Low Voltage|VOL|IO= 8 mA|‐<br>‐<br>0.6|V||



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DS‐0002D.DOCX 

## SP Series 

## Differential Low Pressure Sensors 

## 7.4 SPI Characteristics 

|**Parameter**<br>~~se~~|**Sym**<br>~~se~~|**Condition**<br>~~se~~|**SP210/ SP110/ SP160**<br>~~se~~|**Units**<br>~~se~~|**Notes**<br>~~se~~|
|---|---|---|---|---|---|
||||**Min**<br>**Typ**<br>**Max**<br>~~se~~|||
|Output High Voltage<br>~~a~~|VOH|IO= ‐3 mA|VDD‐0.7<br>‐<br>‐|V|1|
|Output Low Voltage<br>~~a~~|VOL|IO= 8 mA|‐<br>‐<br>0.6|V|1|
|Input High Voltage<br>~~a~~<br>~~ee~~|VIH<br>~~es~~||VDD‐0.6<br>‐<br>‐||2, 3|
|Input Low Voltage<br>~~ee~~<br>~~a~~|VIL<br>~~es~~<br>~~ee~~|~~ee~~|‐<br>‐<br>0.6<br>~~ee~~|~~ee~~|2, 3<br>~~ee~~|
|Internal Pull‐Up<br>Current<br>~~ee~~<br>~~a~~<br>~~ee~~|IPU<br>~~es~~<br>~~ee~~<br>~~ee~~|VIN= 0V<br>~~ee~~<br>~~ee~~|‐<br>‐10<br>‐30<br>~~ee~~<br>~~ee~~|uA<br>~~ee~~<br>~~ee~~|2, 3<br>~~ee~~<br>~~ee~~|
|Time nSS to First<br>SCK Edge<br>~~a~~<br>~~ee~~<br>~~ee~~|tSC<br>~~ee~~<br>~~ee~~|~~ee~~<br>~~ee~~|100<br>‐<br>‐<br>~~ee~~<br>~~ee~~|us<br>~~ee~~<br>~~ee~~|~~ee~~<br>~~ee~~|
|Clock Cycle Time<br>~~ee ~~<br>~~ee~~<br>~~ee~~|tCC<br> ~~ee~~<br>~~ee~~|~~ee~~<br>~~es~~|8<br>‐<br>‐<br>~~ee~~<br>~~es~~|us<br>~~ee~~<br>~~es~~|~~ee~~<br>~~es~~|
|Byte to Byte Cycle<br>Time<br>~~ee~~<br>~~ee~~<br>~~a~~|tBC<br>~~ee~~<br>~~ee ee~~|~~es~~<br>~~ee~~|100<br>‐<br>‐<br>~~es~~<br>~~ee~~|us<br>~~es~~<br>~~ee~~|~~es~~<br>~~ee~~|
|Time Last Clock to<br>nSS High<br>~~ee ~~<br>~~a~~<br>~~ee~~|tCN<br> ~~ee~~<br>~~ee ee~~|~~es~~<br>~~ee~~|20<br>‐<br>‐<br>~~es~~<br>~~ee~~|us<br>~~es~~<br>~~ee~~|~~es~~<br>~~ee~~|
|Cycle Time nSS<br>~~a~~<br>~~ee~~<br>~~ee~~|tCS<br>~~ee ee~~<br>~~es~~|~~ee~~|8<br>‐<br>‐<br>~~ee~~|us<br>~~ee~~|~~ee~~|
|Input Capacitance<br>~~ee~~<br>~~ee~~|CIN<br>~~es~~||‐<br>7<br>‐|pF|2|



2) Inputs MISO, SCK, nSS 

3) Inputs are 5V compliant. 

## 7.5 I[2] C Characteristics 

|**Parameter**|**Sym**|**Condition**|**SP210/ SP110/ SP160**|**Units**|**Notes**|
|---|---|---|---|---|---|
||||**Min**<br>**Typ**<br>**Max**|||
|SCL Clock Frequency|fSCL||100<br>‐<br>400|kHz||
|Clock Stretch Time|tCKSTR||‐<br>15<br>100|us||
|Input High Voltage|VIH||VDD‐0.6<br>‐<br>‐|||
|Input Low Voltage|VIL||‐<br>‐<br>0.6|||
|Output Low Voltage|VOL|IO= 8 mA|‐<br>‐<br>0.6|V||
|Input Capacitance|CIO||‐<br>7<br>‐|pF||



## 8 Materials 

## 8.1 Wetted Materials 

|**Parameter**|**Sym**|**SP210**|**SP210**|**SP110**|**SP110**|**SP160**|**SP160**|**Units**|**Notes**|
|---|---|---|---|---|---|---|---|---|---|
|||**PA**|**PB**|**PA**|**PB**|**PA**|**PB**|||
|Wetted Materials|MATWET|Epoxy<br>Nylon<br>RTV<br>Silicon|Epoxy<br>Nylon<br>RTV<br>Silicon<br>Gold<br>Aluminum|Epoxy<br>Nylon<br>RTV<br>Silicon|Epoxy<br>Nylon<br>RTV<br>Silicon<br>Gold<br>Aluminum|Epoxy<br>Nylon<br>RTV<br>Silicon<br>Gold<br>Aluminum|Epoxy<br>Nylon<br>RTV<br>Silicon<br>Gold<br>Aluminum|||



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## SP Series 

## Differential Low Pressure Sensors 

## 8.2 Material Compliance 

|**Parameter**|**Sym**|**SP210**|**SP210**|**SP110**|**SP110**|**SP160**|**SP160**|**Units**|**Notes**|
|---|---|---|---|---|---|---|---|---|---|
|||**PA**|**PB**|**PA**|**PB**|**PA**|**PB**|||
|RoHS|REGRoHS|RoHS Compliant||||||||
|REACH|REGREAC|REACH Compliant||||||||



## 9 System Overview 

The SP Series pressure sensor is a fully integrated pressure acquisition system in a sensor module. The acquisition system includes anti‐alias filters, data acquisition, sensor compensation, AZ Control, noise suppression, bandwidth limiting and I/O functions. Refer to the figure below for the SP Series block diagram. 

**==> picture [534 x 390] intentionally omitted <==**

**----- Start of picture text -----**<br>
User Control Registers DAV<br>HW<br>Interface nRST<br>Mode Control Rate Control<br>Rate<br>Controller<br>Pressure Anti‐Alias  Δ‐Sigma  Range  AZ with Enable/ BW<br>Sensor Filter Modulator 2b Control 2b Control 1b Disable 3b Control<br>AZ Block<br>Va Anti‐Alias Filter ModulatorΔ‐Sigma Z‐TrackWith MISO/SDA<br>aHT K Decimation 4 CompensationFPU with LtaL. ‐ ∑  Zero Noise  BW LimitIIR ; - SPI/I [2] C  MOSI/SCLSCK<br>Linearization + Suppression (2 [nd]  Order) Interface nSS<br>T [o] SAR ADC<br>To ) ee  (A . Hy<br>26 Term<br>Compensation<br>| Coefficients<br>Vs<br>SAR ADC<br>SYS<br>O—< _<br>There are also two user controlled registers that tune the sensor to the specific user requirements.  The first register is the Mode<br>Control register that determines the output pressure range, the corner frequency of the bandwidth limiting filter, enables or disables<br>the noise suppression filter and controls the Auto‐Zero block with Z‐Track™.<br>The second register is the Rate Control register which<br>controls the rate at which the Data Available (DAV) pin is<br>asserted. The internal sensor data update rate is 498 Hz.  Rate Control<br>Register<br>The Rate Control register will throttle down the rate at<br>Reload Value<br>which the Data Available pin (DAV) is asserted by<br>Internal Update  Zero DAV<br>counting down from the value set in the Rate Control  Down Counter S Q<br>(fUPDATE)<br>Register and setting the DAV pin upon reaching zero in<br>the down counter. The DAV is reset upon each read of<br>Data Read<br>the pressure sensor. An internal model of the Rate  R<br>Controller is illustrated in the figure to the right. In the<br>FIG‐0042A<br>FIG‐0012B<br>**----- End of picture text -----**<br>


There are also two user controlled registers that tune the sensor to the specific user requirements.  The first register is the Mode Control register that determines the output pressure range, the corner frequency of the bandwidth limiting filter, enables or disables the noise suppression filter and controls the Auto‐Zero block with Z‐Track™. 

The second register is the Rate Control register which controls the rate at which the Data Available (DAV) pin is asserted. The internal sensor data update rate is 498 Hz. The Rate Control register will throttle down the rate at which the Data Available pin (DAV) is asserted by counting down from the value set in the Rate Control Register and setting the DAV pin upon reaching zero in the down counter. The DAV is reset upon each read of the pressure sensor. An internal model of the Rate Controller is illustrated in the figure to the right. In the event the Rate Control Register is set to zero, the sensor 

will automatically select a Rate Control Register value that is determined by the currently selected bandwidth. Refer to Section 10.6.2 for details on the rate control register functionality. 

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## SP Series 

## Differential Low Pressure Sensors 

## 10 Interface 

## 10.1 Reset 

Reset timing is shown in the diagram below. 

The communications method (SPI or I[2] C) is established during the time just after rest. During this time (tIOD), no communications should take place. 

Also, the internal filters are settling during the time tFRD and data acquired during this time may not be fully settled. 

**==> picture [411 x 196] intentionally omitted <==**

**----- Start of picture text -----**<br>
 Reset Timing Diagram<br>VDD VPORR VPORF<br>Internal Reset<br>tRSTL<br>_RST<br>tIOD tIOD<br>Communications<br>Available<br>tFRD tFRD<br>Filters Settled<br>FIG‐0021A<br>**----- End of picture text -----**<br>


## 10.2 Communication Interface Selection 

The communications interface is selected by interrogating the nSS pin after the internal power on reset delay. If nSS is high, the SPI interface will be selected otherwise (if low) the I[2] C interface will be selected. Grounding the nSS pin is an acceptable method for selecting the I[2] C interface. 

## 10.3 SPI Interface 

The SPI interface uses a 16 bit transfer for all communications. Data is MSB first for both MOSI and MISO data transfers. Refer to the figure below for specific timing requirements. 

**==> picture [459 x 125] intentionally omitted <==**

**----- Start of picture text -----**<br>
 SPI Timing Diagram<br>tsc tcc tbc tcn tcs<br>SCK<br>MOSI AANA AAA A Bit 7 a Bit 6 DC Bit 5 Bit 4 CT Bit 3 CREED CREEDGERRI Bit 2 Bit 1 Bit 0  GEREN CREED Bit 7  CHREEED Bit 6  GREED CREED Bit 5 Bit 4  GHRREED Bit 3  CHED Bit 2  GENRES Bit 1 GHIRRIIIID Bit 0 1151401. 0 0000 4C0Accoac COA<br>MISO eee Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 eee<br>nSS TO™—LLL_ FIG‐0013A<br>**----- End of picture text -----**<br>


The data communications has been reduced to a simple 16 bit transfer model for reading the pressure output. Each communication cycle consists of master sending the Mode and Rate data to be placed into the sensor Mode Register and Rate Registers respectively. Simultaneously, the sensor sends the pressure data for the master to receive. Refer to the figure below for the data communication model of the SP Series sensor. 

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## Differential Low Pressure Sensors 

The requirement to send the Mode and Rate bytes on each data read cycle is intentional. The purpose is to force the master to send specific data for each communication and prevent inadvertent data from being sent to the sensor. Since a SPI interface will generally re‐circulate data through its shift register, the intention is to prevent the pressure output from the sensor from being re‐circulated back to the sensor and potentially causing unintended corruption of manufacturing data. 

**==> picture [459 x 111] intentionally omitted <==**

**----- Start of picture text -----**<br>
 SPI Data Diagram<br>SCK ___FTLFL LIL LF LF LU LVL _FLI LUF F LW LU LW LU LF WV _____L___<br>MOSI XXX  User Mode Byte  User Rate Byte<br>MISO F Pressure Output High Byte FF Pressure Output Low Byte }<br>nSS a cn A FIG‐0014A<br>**----- End of picture text -----**<br>


## 10.4 I[2] C Interface 

The SP Series is compatible with the I[2] C protocol. For detailed information regarding the I[2] C protocol, please refer to the Philips I[2] C Bus Specification, Version 2. 

## 10.4.1 I[2] C Address 

|I2C Address Selection Table|I2C Address Selection Table|I2C Address Selection Table|I2C Address Selection Table|
|---|---|---|---|
|R1 (kΩ)|R2 (kΩ)|Address<br>(decima|Address<br>al)<br>Address<br>(hex)|
|120|5.6|49|0x31|
|120|12|48|0x30|
|120|27|47|0x2F|
|120|51|46|0x2E|
|120|100|45|0x2D|
|56|100|44|0x2C|
|30|100|43|0x2B|
|15|100|42|0x2A|
|5.6|100|41|0x29|
|0|NoPop|40|0x28|



The I[2] C address is set to 0x28 by grounding the SCK line. Other I[2] C addresses can be established by applying a voltage to the SCK line by use of a resistor divider across the sensor supply voltage. The suggested resistor values and the respective I[2] C address are shown in the table to the left. 

Note: R1 is the lower resister of the divider where R2 is the upper resistor of the divider. 

## 10.4.2 I[2] C Communications Model 

The sensor is configured as a slave device and as such, the communicating host must be configured as a master. There are two types of possible data transfers, data transfers from the master transmitter to an addressed sensor (WRITE), and data transfers from an addressed sensor to a master receiver (READ).  The master device initiates both types of data transfers and provides the serial clock pulses on SCL. 

The communications model for I[2] C is similar to that of SPI however, since I[2] C is a half‐duplex protocol, the transfer of information to and from the sensor is 

separated into two separate communications. This is in contrast to the SPI interface where the transmitted and received data occurs simultaneously to and from the host. Refer to the figure to the right for the data communication model for the SP Series sensors. 

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## Differential Low Pressure Sensors 

## 10.4.3 I[2] C Clock Stretching 

The figure to the right illustrates the I[2] C 12C Clock Stretching clock stretching by the sensor. At times, the sensor requires additional time to respond to the host and utilizes the clock stretching oe LE feature of the I[2] C protocol. This is accomplished by holding the SCL low after the ACK cycle of a data transfer. Refer to Section 7.5 for the clock stretching timing. Note, the maximum clock stretch time will generally only occur once during the three ACK cycles of a two byte transfer. That is, the balance of ACK's during a multi‐byte transfer will generally include the typical clock stretching time. 

## 10.4.4 I[2] C Bus Compatibility 

The I[2] C specification allows any recessive voltage between 3.0 and 5.0 V. Different devices on the bus may operate at different voltage levels. However, the maximum voltage on any port pin must conform to the electrical characteristics specifications (See section 1). The bi‐directional SCL (serial clock) and SDA (serial data) lines must be connected to a positive power supply voltage through a pull‐up resistor or similar circuit. Every device connected to the bus must have an open‐drain or open‐collector output for both the SCL and SDA lines, so that both are pulled high (recessive state) when the bus is free. 

## 10.5 Extended Data Acquisition 

## 10.5.1 Available Extended Data 

For either the SPI or I[2] C interface, additional data is available beyond the pressure. The means to access this extended data is to continue reading data (either SPI or I[2] C) beyond the first 16 bits of pressure information. The following table defines the order of the available data and respective format. 

|**Data**|**Bytes**|**Format**|**Interpretation**|**Example**|
|---|---|---|---|---|
|Pressure|1‐2|2 byte, Signed Int|See Section 10.7|See Section 10.7|
|Temperature|3‐4|2 byte, Signed Int|Fixed Decimal [8.8 bits], Upper 8 bits<br>integer, lower 8 bits fractional.<br>Temperature in °C|1880H (18.80H) = 24.5°C|
|Model|5‐10|6 byte, ASCII, null<br>terminated|Right reading ASCII with null<br>termination|48H,56H,32H,31H,30H,00H = HV210|
|Serial Number|11‐14|4 byte, Hex|Unique 4 byte serial for each part|2FD627A4H|
|Build Number|15‐20|6 byte, ASCII, null<br>terminated|Right reading ASCII with null<br>termination|30H,30H,30H,33H,43H,00H = 0003C|



## 10.5.2 SPI Extended Data Read 

Reading the extended data while using the SPI interface is the same as shown in Section 10.3 with exception that the master continues to read during the same nSS sequence to read all 20 bytes of the extended data. Any portion of the 20 bytes can be read during the transfer. That is, for example, 4 bytes could be read to acquire only the pressure and temperature information.  When reading the extended data, only the first two bytes sent to the sensor (User Mode and User Rate) are used to set the internal registers. The subsequent bytes (bytes 5 through 20) are ignored. Data read following the first 20 bytes is undefined. 

## 10.5.3 I[2] C Extended Data Read 

Reading the extended data via the I[2] C interface is similar to using the SPI interface where the master can simply continue to reading the sensor during the pressure reading transfer. The master continues Ack'ing until the number of desired bytes are read. 

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## SP Series 

## Differential Low Pressure Sensors 

## 10.6 Control Registers 

## 10.6.1 Mode Control Register 

## Mode Control Register Detail 

## Default Value: 0x93 

**==> picture [547 x 516] intentionally omitted <==**

**----- Start of picture text -----**<br>
= Mode Register (General)<br>Details of the Mode Control register are illustrated in the figure to  b7 b6 b5 b4 b3 b2 b1 b0<br>the right.<br>Bits 0‐1 control the output pressure range.   Pressure Range SelectBW Limit Select<br>AZ Enable<br>Bits 2‐4 control the BW Limit Filter.<br>AZ Mode<br>Zero‐Noise<br>Bit 5 7 enables the Auto‐Zero function. Upon the rising edge of bit 5  == Suppression Enable<br>(writing a 1 with the prior value being a 0), the current pressure<br>output is captured as the zero point. The detailed behavior of this<br>Mode Register (Detail)<br>zero value is determined by bit 6 (Auto‐Zero Mode bit). The Auto‐<br>b7 b6 b5 b4 b3 b2 b1 b0<br>Zero behavior will continue while bit 5 remains set. When bit 5  —<br>returns to 0, the Auto‐Zero function will be turned off and there<br>Pressure Range Select (by Model)<br>will be no forced zero of the part output.  SP210 SP110 SP160<br>Bit 6 determines the specific Auto‐Zero mode. It is captured on the  0 0 1.0 inH2O 1.0 inH2O 20 inH2O<br>rising edge of bit 5. If bit 6 is zero, a standard Auto‐Zero is  0 1 2.0 inH2O 2.0 inH2O 40 inH2O<br>1 0 5.0 inH2O 5.0 inH2O 80 inH2O<br>performed. If bit 6 is 1,  the Z‐Track mode is initiated.<br>1 1 10.0 inH2O 10.0 inH2O 160 inH2O<br>Standard Auto‐Zero<br>When the standard Auto‐Zero is initiated, the current zero  BW Limit Select<br>pressure point is captured and is subtracted from the  0 0 0 25 Hz<br>compensated output until the Auto‐Zero function is turned  0 0 1 35 Hz<br>off.  0 1 0 50 Hz<br>0 1 1 65 Hz<br>Z‐Track Mode<br>1 0 0 100 Hz<br>When the Z‐Track Mode is initiated, the current zero pressure  1 0 1 130 Hz<br>point is captured and subtracted from the compensated<br>1 1 0 180 Hz<br>output. The zero point is also tracked while the pressure<br>output is within the noise floor of the sensor. During a  1 1 1 250 Hz<br>pressure excursion, the zero tracking is suspended until such  Auto‐Zero Enable<br>time as the sensor output returns to the sensor noise floor. At  0 Disabled<br>this time, the sensor recaptures the zero point and continues  ↑  Capture Zero<br>tracking zero. This function remains active while the Auto‐Zero<br>1 Enabled<br>— ——<br>Enable bit (bit 5) remains high.<br>Bit 7 ~ is the Zero‐Noise Suppression Enable bit. Setting this bit will  0 Standard (Capture Only)Auto‐Zero Mode (1)<br>cause the sensor to suppress noise around the zero pressure<br>output value. It is beneficial to set this bit any time the Auto‐Zero  1 Z‐Track (Capture‐Track)<br>function is enabled.<br>Zero‐Noise Suppress<br>0<br>Disabled<br>1<br>Enabled<br>—<br>It should also be noted that upon changing the Mode Control  Note 1: Auto‐Zero Mode is captured on the rising edge of Auto‐Zero Enable FIG‐0043A<br>**----- End of picture text -----**<br>


Bit 5 enables the Auto‐Zero function. Upon the rising edge of bit 5 (writing a 1 with the prior value being a 0), the current pressure output is captured as the zero point. The detailed behavior of this zero value is determined by bit 6 (Auto‐Zero Mode bit). The Auto‐ Zero behavior will continue while bit 5 remains set. When bit 5 returns to 0, the Auto‐Zero function will be turned off and there will be no forced zero of the part output. 

Bit 6 determines the specific Auto‐Zero mode. It is captured on the rising edge of bit 5. If bit 6 is zero, a standard Auto‐Zero is performed. If bit 6 is 1,  the Z‐Track mode is initiated. 

It should also be noted that upon changing the Mode Control value, there is a one cycle latency before the new Mode Control 

value becomes valid. That is, the data of the communication cycle following a change to the Mode Control register will not reflect the change. It is not until the second communication cycle that the change in the Mode Control register will be reflected in the output data. 

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## SP Series 

## Differential Low Pressure Sensors 

## 10.6.2 Rate Control Register 

Rate Control Register Detail 

## Default Value: 0x00 

The Rate Control Register controls the rate at which the DAV pin is asserted indicating new data is available. This register is primarily used to throttle down the actual data transfer rate (when using the DAV as the trigger to sample data). 

The function of this register is that it is the reload value of a data rate down‐counter. The value of the Rate Control Register is the divisor of the 498 Hz internal data rate. Since a divisor of zero is not possible, a zero value will select the auto‐select rate mode. In this mode, the rate is selected based on the selected bandwidth limit. The auto rate value is two times the corner frequency of the currently selected bandwidth limit in all auto selected rates. 

Note: Start‐up time for the sensor is approximately 60ms for the first sample to be settled. Requesting data during this time will result in invalid information. However, this start‐up time can be used for configuring the Mode and Rate registers by performing a transfer with the desired Mode and Rate register values and discarding the received pressure data. After waiting the required start‐up time, the sensor will respond with desired data since the Mode and Rate registers have been pre‐established. 

|b7|b7|b6|b6|b5<br>Rate Control Register|b5<br>Rate Control Register|b4<br>b3<br>b2<br>Rate Control Register|b4<br>b3<br>b2<br>Rate Control Register|b4<br>b3<br>b2<br>Rate Control Register|b4<br>b3<br>b2<br>Rate Control Register|b4<br>b3<br>b2<br>Rate Control Register|b4<br>b3<br>b2<br>Rate Control Register|b1|b1|b0|b0||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|0||0||0||0||0||0||0||0||Auto Select|||||
|0||0||0||0||0||0||0||1||498.5 Hz|||||
|0||0||0||0||0||0||1||0||249.2 Hz|||||
|0||0||0||0||0||0||1||1||166.2 Hz|||||
||||||||||||||||||||||
|1||1||1||1||1||1||1||0||1.96 Hz|||||
|1||1||1||1||1||1||1||1||1.95 Hz|||||
||||||||||||||||||||||
|||||||||||||||||Selected BW Limit|Selected BW Limit||Auto Select Rate||
|||||||||||||||||25 Hz|25 Hz||49.8 Hz||
|||||||||||||||||35 Hz|35 Hz||71.2 Hz||
|||||||||||||||||50 Hz|50 Hz||99.7 Hz||
|||||||||||||||||65 Hz|65 Hz||124.6 Hz||
|||||||||||||||||100 Hz|||249.2 Hz||
|||||||||||||||||130 Hz|||249.2 Hz||
|||||||||||||||||180 Hz|||498.5 Hz||
|||||||||||||||||250 Hz|||498.5 Hz||



## 10.7 Computing Pressure 

The pressure data is in the form of 16 bit signed integer sent in high byte then low byte order. This is a differential output by definition and the data range is ±2[15] . There is a 10% margin in the output scaling and the selected full scale will reside in the 90% band of the total available output data range. Refer to Equation 1 (below) for the general model for computing the output pressure. As an example, if the sensor output is 3,647 counts and the selected pressure range is 1.0 inH2O, then the output pressure is 0.124 inH2O. Conversely, for a ‐3,647 count with the selected pressure range of 1.0 inH2O, the computed output pressure is ‐0.124 inH2O. Refer to Example 1 (below) for the specific example computation. 

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## SP Series Differential Low Pressure Sensors 

## 11 Mechanical and Manufacturing 

## 11.1 Package Dimensions 

## 11.2 Suggested Pad Layout 

The suggested pad layout is shown in the figure below. An Eagle PCB symbol library is available with the shown pad dimensions. Please consult the factory to obtain the library. 

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## SP Series 

## Differential Low Pressure Sensors 

## 11.3 Pinout 

|**Pin**|**Sym **|**SPI**|**I2C**|
|---|---|---|---|
|1|nSS|Slave Select<br>(active low)|Tie to Ground|
|2|MOSI/SCL|MOSI|SCL|
|3|MISO/SDA|MISO|SDA|
|4|SCK|Serial Clock|See Section 10.4.1|
|5|DNC|Do Not Connect||
|6|DNC|Do Not Connect||
|7|DNC|Do Not Connect||
|8|Gnd|Ground||
|9|VDD|Sensor Supply||
|10|nRST|Reset(active low)||
|11|DAV|Data Available||



## 11.4 Reflow Soldering and Handling Conditions 

|**Parameter**|**Sym **|**Val**|**Units**|
|---|---|---|---|
|Soldering Specifications (Max)<br>Preheat Ramp Rate<br>Soak Time<br>Time Above 217C<br>Time Above 230C<br>Time Above 250C<br>Peak Temperature<br>CoolingRampRate|tPHRR<br>tSOAK<br>tGT217<br>tGT230<br>tGT250<br>tPT<br>tCRR|3<br>3<br>50<br>40<br>15<br>255<br>‐4|°C/s<br>min<br>s<br>s<br>s<br>°C<br>°C/s|
|Weight|WPRT|3.5|gm|
|Moisture Sensitivity|MSL|3||
|ESD (Human Body Model)|ESD|2|kV|



## 11.5 Pick and Place Pick-up Zone 

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## SP Series Differential Low Pressure Sensors 

## 11.6 Packaging Options 

## 11.6.1 Tray Packaging 

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## SP Series Differential Low Pressure Sensors 

## 11.6.2 Tape and Reel 

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## SP Series 

## Differential Low Pressure Sensors 

## 11.7 Part Identification 

## 12 Ordering Information 

|**Part Number**|**Part**<br>**Package **|**Packaging**|**Packaging**<br>**Qty**|**Order Number**|
|---|---|---|---|---|
|SP160‐SM02|SM02|Tape and Reel<br>Multi‐Tray<br>Single Tray<br>Quarter Reel<br>Cut Tape|256<br>512<br>64<br>64<br>1‐63|SP160‐SM02‐R<br>SP160‐SM02‐M<br>SP160‐SM02‐T<br>SP160‐SM02‐Q<br>SP160‐SM02‐C|
|SP110‐SM02|SM02|Tape and Reel<br>Multi‐Tray<br>Single Tray<br>Quarter Reel<br>Cut Tape|256<br>512<br>64<br>64<br>1‐63|SP110‐SM02‐R<br>SP110‐SM02‐M<br>SP110‐SM02‐T<br>SP110‐SM02‐Q<br>SP110‐SM02‐C|
|SP210‐SM02|SM02|Tape and Reel<br>Multi‐Tray<br>Single Tray<br>Quarter Reel<br>Cut Tape|256<br>512<br>64<br>64<br>1‐63|SP210‐SM02‐R<br>SP210‐SM02‐M<br>SP210‐SM02‐T<br>SP210‐SM02‐Q<br>SP210‐SM02‐C|



## 13 Packaging Labeling 

Packaging labels are provided with barcode Code 128 symbology. The provided fields are Company Name, Part Number, Packaging ID,  Quantity and Country of Origin. The Packaging ID traces back to the Lot Number (or Lot Numbers) contained in the package. The purpose is to eliminate multiple labels (one for each included Lot Number) in the event of multiple Lot Numbers within a single package. This is for ease of customer tracking and maintenance. The Packaging ID is a 24 bit value printed in hexadecimal format. 

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## SP Series 

## Differential Low Pressure Sensors 

## 14 Revisions 

|**Rev**|**Change Description(s)**|**Date**|**By**|
|---|---|---|---|
|A|Initial Release|03/22/19|M.B.|
|B|1) Correct I2C Address Selection Table|3/31/2020|T.S.|
|C|1) Revise I2C Address Selection Table Resistor Values|2/4/2021|T.S.|
|D|1) Updated Ordering Information|9/27/2021|A.G.|



## 15 Warranty 

Superior Sensor Technology and its subsidiaries warrant goods of its manufacture as being free of defective materials and faulty workmanship during the applicable warranty period. In all cases, Superior Sensor Technology's standard product warranty applies; please refer to your order acknowledgement or consult your local sales office for specific warranty details. 

If warranted goods are returned to Superior Sensor Technology during the period of coverage, Superior Sensor Technology will repair or replace, at its option, without charge those items that Superior Sensor Technology, in its sole discretion, finds defective. **The foregoing is buyer’s sole remedy and is in lieu of all other warranties, expressed or implied. In no event shall Superior Sensor Technology be liable for consequential, special, or indirect damages.** 

While Superior Sensor Technology may provide application assistance personally, through literature or the Superior Sensor Technology web site, it is buyer's sole responsibility to determine the suitability of the product in their application.  Superior Sensor Technology assumes no liability for applications assistance or customer product design. 

Superior Sensor Technology reserves the right to make corrections, modifications, enhancements, improvements and other changes to its products and services at any time and to discontinue any product or service without notice.  Customers should obtain the latest relevant information before placing orders and should verify that such information is current and complete. 

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